Invention Grant
- Patent Title: Micro heater and micro sensor and manufacturing methods thereof
-
Application No.: US14864184Application Date: 2015-09-24
-
Publication No.: US10015841B2Publication Date: 2018-07-03
- Inventor: Bum Mo Ahn , Seung Ho Park , Sung Hyun Byun
- Applicant: Point Engineering Co., Ltd.
- Applicant Address: KR Asan-si, Chungcheongnam-do
- Assignee: Point Engineering Co., Ltd.
- Current Assignee: Point Engineering Co., Ltd.
- Current Assignee Address: KR Asan-si, Chungcheongnam-do
- Agency: Sunstein Kann Murphy & Timbers LLP
- Priority: KR10-2014-0127619 20140924; KR10-2014-0127620 20140924
- Main IPC: G01N27/12
- IPC: G01N27/12 ; H05B3/03 ; H05B3/26
Abstract:
A micro heater and a micro sensor is capable of providing a heater having a small thermal capacity by forming an air gap which surrounds the heater wire, and forming the heater wire on a porous substrate.
Public/Granted literature
- US20160084787A1 Micro Heater and Micro Sensor and Manufacturing Methods Thereof Public/Granted day:2016-03-24
Information query
