Invention Grant
- Patent Title: Sensor chip for electrostatic capacitance measurement and measuring device having the same
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Application No.: US15869298Application Date: 2018-01-12
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Publication No.: US10018484B2Publication Date: 2018-07-10
- Inventor: Kippei Sugita , Tomohide Minami
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2015-118184 20150611; JP2015-207787 20151022
- Main IPC: G01R27/26
- IPC: G01R27/26 ; G01D5/241 ; G01D5/24 ; G06F3/044 ; G06K9/00

Abstract:
Electrostatic capacitance can be measured with high directivity in a specific direction. A sensor chip that measures the electrostatic capacitance includes a first electrode, a second electrode and a third electrode. The first electrode has a first portion. The second electrode has a second portion extended on the first portion of the first electrode, and is insulated from the first electrode within the sensor chip. The third electrode has a front face extended in a direction which intersects with the first portion of the first electrode and the second portion of the second electrode, and is provided on the first portion and the second portion. The third electrode is insulated from the first electrode and the second electrode within the sensor chip. No portion is extended from the first electrode to be positioned above the first portion.
Public/Granted literature
- US20180136013A1 SENSOR CHIP FOR ELECTROSTATIC CAPACITANCE MEASUREMENT AND MEASURING DEVICE HAVING THE SAME Public/Granted day:2018-05-17
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