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1.发明申请公开(公告)号：US20210343560A1
公开(公告)日：2021-11-04
申请号：US17378190
申请日：2021-07-16
Applicant: Tokyo Electron Limited
Inventor： Sylvain Ballandras , Thierry Laroche , Kimihiro Matsuse , Jacques Berg , Tomohide Minami
IPC: H01L21/67 , G01K11/22 , G01K13/00 , G01K3/14 , H03H9/02 , H03H9/25 , H03H1/00 , H01J37/32 , H03H3/08 , H03H9/42 , G01D5/48 , G01K1/02 , G01K11/26
Abstract: An apparatus and method for real-time sensing of properties in industrial manufacturing equipment are described. The sensing system includes first plural sensors mounted within a processing environment of a semiconductor device manufacturing system, wherein each sensor is assigned to a different region to monitor a physical or chemical property of the assigned region of the manufacturing system, and a reader system having componentry configured to simultaneously and wirelessly interrogate the plural sensors. The reader system uses a single high frequency interrogation sequence that includes (1) transmitting a first request pulse signal to the first plural sensors, the first request pulse signal being associated with a first frequency band, and (2) receiving uniquely identifiable response signals from the first plural sensors that provide real-time monitoring of variations in the physical or chemical property at each assigned region of the system.
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2.发明申请公开(公告)号：US20190057887A1
公开(公告)日：2019-02-21
申请号：US16104335
申请日：2018-08-17
Applicant: Tokyo Electron Limited
Inventor： Sylvain Ballandras , Thierry Laroche , Kimihiro Matsuse , Jacques Berg , Tomohide Minami
IPC: H01L21/67 , G01K11/22 , G01K13/00 , G01K3/14 , H03H9/02 , H03H9/42 , H03H9/25 , H03H1/00 , H01J37/32 , H03H3/08
Abstract: An apparatus and method for real-time sensing of properties in industrial manufacturing equipment are described. The sensing system includes first plural sensors mounted within a processing environment of a semiconductor device manufacturing system, wherein each sensor is assigned to a different region to monitor a physical or chemical property of the assigned region of the manufacturing system, and a reader system having componentry configured to simultaneously and wirelessly interrogate the plural sensors. The reader system uses a single high frequency interrogation sequence that includes (1) transmitting a first request pulse signal to the first plural sensors, the first request pulse signal being associated with a first frequency band, and (2) receiving uniquely identifiable response signals from the first plural sensors that provide real-time monitoring of variations in the physical or chemical property at each assigned region of the system.
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公开(公告)号：US09970838B2
公开(公告)日：2018-05-15
申请号：US14733327
申请日：2015-06-08
Applicant: TOKYO ELECTRON LIMITED
Inventor： Tomohide Minami
Abstract: Provided is a pressure measuring device including a first electric resistor that is exposed to gas; a second electric resistor that is exposed to gas and has the same structure as that of the first electric resistor; a first measuring unit that measures a first voltage drop generated across the first electric resistor; a second measuring unit that measures a second voltage drop generated across the second electric resistor; a third measuring unit that measures a third voltage drop generated across the first electric resistor; a calculating unit that calculates a correction value that corrects the third voltage drop, based on a difference between the first voltage drop and the second voltage drop; and an output unit that corrects the third voltage drop using the calculated correction value and outputs a pressure value according to the third voltage value after the correction.
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公开(公告)号：US09709453B2
公开(公告)日：2017-07-18
申请号：US14734043
申请日：2015-06-09
Applicant: TOKYO ELECTRON LIMITED
Inventor： Tomohide Minami
IPC: G01L21/12
CPC classification number: G01L21/12
Abstract: Disclosed is a method for manufacturing a sensor module that generates heat through an electric resistor adapted to be exposed to a gas, and outputs a temperature change caused in the electric resistor according to a pressure of the gas, as a resistance change of the electric resistor. The method includes: forming an insulation layer on a substrate in which the insulation layer is an oxide film or a nitride film; and forming a conductor layer on the insulation layer under a temperature condition of 300° C. to 600° C., in which the conductor layer serves as the electric resistor.
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5.发明申请公开(公告)号：US20180136013A1
公开(公告)日：2018-05-17
申请号：US15869298
申请日：2018-01-12
Applicant: Tokyo Electron Limited
Inventor： Kippei Sugita , Tomohide Minami
CPC classification number: G01D5/2417 , G01D5/24 , G01R27/2605 , G06F3/044 , G06K9/0002
Abstract: Electrostatic capacitance can be measured with high directivity in a specific direction. A sensor chip that measures the electrostatic capacitance includes a first electrode, a second electrode and a third electrode. The first electrode has a first portion. The second electrode has a second portion extended on the first portion of the first electrode, and is insulated from the first electrode within the sensor chip. The third electrode has a front face extended in a direction which intersects with the first portion of the first electrode and the second portion of the second electrode, and is provided on the first portion and the second portion. The third electrode is insulated from the first electrode and the second electrode within the sensor chip. No portion is extended from the first electrode to be positioned above the first portion.
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Patent Agency Ranking
公开(公告)号：US09841395B2
公开(公告)日：2017-12-12
申请号：US15179306
申请日：2016-06-10
Applicant: TOKYO ELECTRON LIMITED
Inventor： Kippei Sugita , Tomohide Minami
IPC: G01N27/24 , G01R27/26 , G01R31/28 , H01J37/32 , G01R31/3185 , G01R31/265
CPC classification number: G01N27/24 , G01R27/2605 , G01R31/265 , G01R31/2831 , G01R31/318511 , H01J37/32009 , H01J37/321 , H01J37/32211
Abstract: A system of inspecting a focus ring is provided. The system includes a measuring device, a transfer device and an operation unit. The measuring device includes a base substrate, a sensor chip and a circuit board. The sensor chip has a sensor electrode and is provided along an edge of the base substrate. The circuit board is configured to output a high frequency signal to the sensor electrode and acquire a digital value indicating electrostatic capacitance based on a voltage amplitude in the sensor electrode. The transfer device is configured to scan the measuring device. The operation unit is configured to obtain difference values by performing a difference operation with respect to the digital values acquired by the measuring device at multiple positions along a direction which intersects with an inner periphery of the focus ring.
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公开(公告)号：US09702038B2
公开(公告)日：2017-07-11
申请号：US14734121
申请日：2015-06-09
Applicant: TOKYO ELECTRON LIMITED
Inventor： Tomohide Minami
CPC classification number: C23C14/5873 , G01L21/12
Abstract: Disclosed is a pressure sensor that outputs a temperature change caused in an electrical resistor according to a pressure of a gas, as a resistance change in the electrical resistor. The pressure sensor includes: a base substrate including a recess formed therein, a floating film formed on the base substrate, a heater formed on a surface of the floating film and configured to heat the floating film when a current flows therein, and a temperature sensor formed as the electrical resistor on the surface of the floating film. The temperature sensor changes a voltage drop with respect to a current flowing therein according to the temperature of the floating film.
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8.发明授权公开(公告)号：US11841278B2
公开(公告)日：2023-12-12
申请号：US16976732
申请日：2019-07-11
Applicant: Tokyo Electron Limited
Inventor： Tong Wu , Tomohide Minami , Masaaki Miyagawa
IPC: G01K11/32 , G01J5/0821 , G01K11/324
CPC classification number: G01K11/32 , G01J5/0821 , G01K11/324
Abstract: A temperature measurement sensor according to an exemplary embodiment includes a substrate and an optical fiber provided on an upper surface of the substrate and extending along the upper surface. The temperature measurement sensor further includes a light introduction path of a space that allows a space above the upper surface and a space below a lower surface of the substrate to communicate with each other and an optical coupling portion provided on the upper surface and disposed in the light introduction path. The optical coupling portion is optically connected to the end surface of the optical fiber. The optical fiber forms the first pattern shape and the second pattern shape. The first pattern shape includes the optical fiber more densely than the second pattern shape. Light incident on the optical coupling portion from a side of the lower surface through the light introduction path reaches the end surface through the optical coupling portion.
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公开(公告)号：US20190033103A1
公开(公告)日：2019-01-31
申请号：US16045910
申请日：2018-07-26
Applicant: TOKYO ELECTRON LIMITED
Inventor： Kippei Sugita , Tomohide Minami
IPC: G01D18/00 , H01L21/67 , H01L21/683 , H01J37/32 , G01D5/24
Abstract: In a method for calibrating a measuring device by using a case which includes a case main body configured to accommodate the measuring device, a restricting portion configured to restrict translation of the measuring device accommodated in the case main body and reference surfaces provided in the case main body to face the respective sensor electrodes, a plurality of detection values is acquired in a state where translation of the measuring device accommodated in the case is restricted by the restricting portion, the reference surfaces face respective sensor electrodes of the measuring device and a high frequency signal is applied to the sensor electrodes. Then, coefficients in functions used in calculating measurement values are calibrated such that the measurement values become a predetermined value.
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10.发明授权公开(公告)号：US09903739B2
公开(公告)日：2018-02-27
申请号：US15179189
申请日：2016-06-10
Applicant: TOKYO ELECTRON LIMITED
Inventor： Kippei Sugita , Tomohide Minami
CPC classification number: G01D5/2417 , G01D5/24 , G01R27/2605 , G06F3/044 , G06K9/0002
Abstract: Electrostatic capacitance can be measured with high directivity in a specific direction. A sensor chip that measures the electrostatic capacitance includes a first electrode, a second electrode and a third electrode. The first electrode has a first portion. The second electrode has a second portion extended on the first portion of the first electrode, and is insulated from the first electrode within the sensor chip. The third electrode has a front face extended in a direction which intersects with the first portion of the first electrode and the second portion of the second electrode, and is provided on the first portion and the second portion. The third electrode is insulated from the first electrode and the second electrode within the sensor chip.
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