Invention Grant
- Patent Title: Vitreous silica crucible and evaluation method of the same
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Application No.: US15783969Application Date: 2017-10-13
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Publication No.: US10024784B2Publication Date: 2018-07-17
- Inventor: Toshiaki Sudo , Tadahiro Sato , Ken Kitahara , Eriko Kitahara
- Applicant: SUMCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SUMCO CORPORATION
- Current Assignee: SUMCO CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Law Office of Katsuhiro Arai
- Priority: JP2013-273686 20131228; JP2013-273687 20131228
- Main IPC: C30B15/10
- IPC: C30B15/10 ; G01N21/23 ; G01L1/24 ; C03C3/04 ; H04N5/232 ; C30B29/06 ; G01L5/00

Abstract:
A vitreous silica crucible used to pull up silicon single crystal includes: a cylindrical straight body portion, a corner portion formed at a lower end of the straight body portion, and a bottom portion connected with the straight body portion via the corner portion, wherein the vitreous silica crucible further comprises: an opaque outer layer enclosing bubbles therein; and a transparent inner layer from which bubbles are removed, wherein the residual distortion's distribution obtained by measuring the silica glass's inner surface in a non-destructed state has an optical path difference which is 130 nm or less, which residual distortion's distribution is measured using a distortion-measuring apparatus which converts a linearly polarized light into circularly polarized light and then irradiates the crucible's wall.
Public/Granted literature
- US20180045639A1 VITREOUS SILICA CRUCIBLE AND EVALUATION METHOD OF THE SAME Public/Granted day:2018-02-15
Information query
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