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公开(公告)号：US11535546B2
公开(公告)日：2022-12-27
申请号：US16955009
申请日：2018-11-02
Applicant: SUMCO CORPORATION
Inventor： Ken Kitahara , Masaru Sato , Takuma Yoshioka
Abstract: A silica glass crucible includes a cylindrical side wall portion, a curved bottom portion, and a corner portion that is provided between the side wall portion and the bottom portion and has a higher curvature than a curvature of the bottom portion, in which a first region provided from a crucible inner surface to a middle in a thickness direction, a second region that is provided outside the first region in the thickness direction and has a different strain distribution from the first region, and a third region that is provided outside the second region in the thickness direction and up to the crucible outer surface and has a different strain distribution from the second region, are provided, and internal residual stresses of the first region and the third region are compressive stresses, whereas an internal residual stress of the second region includes a tensile stress.
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公开(公告)号：US09932692B2
公开(公告)日：2018-04-03
申请号：US14901036
申请日：2013-06-30
Applicant: SUMCO CORPORATION
Inventor： Toshiaki Sudo , Tadahiro Sato , Ken Kitahara , Eriko Kitahara
CPC classification number: C30B29/06 , C03B19/095 , C30B15/10 , Y02P40/57
Abstract: A vitreous silica crucible includes: a substantially cylindrical straight body portion having an opening on a top end and extending in a vertical direction; a curved bottom portion; and a corner portion connecting the straight body portion with the bottom portion and a curvature of which is greater than that of the bottom portion, wherein an inner surface of the crucible has a concavo-convex structure in which groove-shaped valleys are interposed between ridges, and an average interval of the ridges is 5-100 μm.
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公开(公告)号：US20150027364A1
公开(公告)日：2015-01-29
申请号：US14369151
申请日：2012-10-31
Applicant: SUMCO CORPORATION
Inventor： Toshiaki Sudo , Tadahiro Sato , Ken Kitahara , Takuma Yoshioka , Hiroshi Kishi
IPC: C30B15/10
CPC classification number: C30B15/10 , C03B19/095 , C30B11/002 , C30B29/06 , C30B35/002 , Y10T117/1032
Abstract: Buckling of a vitreous silica crucible 12 or inward fall of a sidewall 15 is effectively suppressed. The vitreous silica crucible 12 includes the cylindrical sidewall 15 having an upward-opening rim, a mortar-shaped bottom 16 including a curve, and a round portion 17 connecting the sidewall 15 and the bottom 16. In the vitreous silica crucible 12, the per-unit area thermal resistance in the thickness direction of the sidewall 15 is higher than that of the round portion 17.
Abstract translation: 玻璃状石英坩埚12的弯曲或侧壁15的内侧下降被有效地抑制。 玻璃状石英玻璃坩埚12包括具有向上开口边缘的圆柱形侧壁15，包括曲线的砂浆形底部16和连接侧壁15和底部16的圆形部分17.在石英玻璃坩埚12中， 侧壁15的厚度方向的单位面积热阻高于圆形部17的热阻。
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公开(公告)号：US09816917B2
公开(公告)日：2017-11-14
申请号：US15103609
申请日：2014-12-25
Applicant: SUMCO CORPORATION
Inventor： Toshiaki Sudo , Tadahiro Sato , Ken Kitahara , Eriko Kitahara
CPC classification number: G01N21/23 , C03C3/04 , C30B15/10 , C30B29/06 , G01L1/24 , G01L5/0047 , G01N2201/062 , G01N2201/0683 , H04N5/232
Abstract: In an embodiment, a distortion-measuring apparatus for measuring a distortion distribution of an entire vitreous silica crucible in a non-destructive way includes: a light source 11; a first polarizer 12 and a first quarter-wave plate 13 disposed between the light source 11 and an outer surface of a vitreous silica crucible wall; a camera 14 disposed inside of a vitreous silica crucible 1; a camera control mechanism 15 configured to control a photographing direction of the camera 14; a second polarizer 16 and a second quarter-wave plate 17 disposed between the camera 14 and an inner surface of the vitreous silica crucible wall. An optical axis of the second quarter-wave plate 17 inclines 90 degrees with respect to the first quarter-wave plate 13.
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公开(公告)号：US09653268B2
公开(公告)日：2017-05-16
申请号：US15377963
申请日：2016-12-13
Applicant: SUMCO CORPORATION
Inventor： Toshiaki Sudo , Tadahiro Sato , Ken Kitahara , Masami Ohara
CPC classification number: H01J37/32935 , C30B15/00 , C30B15/10 , C30B15/14 , C30B29/06 , C30B35/002 , G01N21/3563 , G01N21/65 , G01N21/68 , G01N21/95 , G01N2021/8477 , G01N2201/105 , G01N2201/12
Abstract: A method of manufacturing a vitreous silica crucible includes an inspection method comprising: a measurement step of measuring an infrared absorption spectrum or a Raman shift of a measurement point on an inner surface of the vitreous silica crucible; a determining step of predicting whether a surface defect region is generated or not in the measurement point based on an obtained spectrum to determine a quality of the vitreous silica crucible.
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Patent Agency Ranking
公开(公告)号：US09557276B2
公开(公告)日：2017-01-31
申请号：US14901030
申请日：2013-06-30
Applicant: SUMCO CORPORATION
Inventor： Toshiaki Sudo , Tadahiro Sato , Ken Kitahara , Masami Ohara
CPC classification number: H01J37/32935 , C30B15/00 , C30B15/10 , C30B15/14 , C30B29/06 , C30B35/002 , G01N21/3563 , G01N21/65 , G01N21/68 , G01N21/95 , G01N2021/8477 , G01N2201/105 , G01N2201/12
Abstract: An inspection method of vitreous silica crucibles includes: a measurement step of measuring an infrared absorption spectrum or a Raman shift of a measurement point on an inner surface of the vitreous silica crucible; a determining step of predicting whether or not a surface-defect region occurs at the measurement point based on an obtained spectrum to determine a quality of the vitreous silica crucible.
Abstract translation: 玻璃状石英坩埚的检查方法包括：测量石英坩埚内表面上的测量点的红外吸收光谱或拉曼偏移的测量步骤; 基于获得的光谱来预测在测量点是否发生表面缺陷区域以确定玻璃石英坩埚的质量的确定步骤。
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公开(公告)号：US09527763B2
公开(公告)日：2016-12-27
申请号：US14979431
申请日：2015-12-27
Applicant: SUMCO CORPORATION
Inventor： Toshiaki Sudo , Ken Kitahara , Takuma Yoshioka
CPC classification number: C03B19/095 , C30B15/10 , C30B29/06 , C30B35/002 , Y02P40/57 , Y10T117/10
Abstract: A method of manufacturing a composite crucible includes: supplying mullite material powder to an upper region of a mold, and supplying second silica powder to a lower region provided below the upper region while rotating the mold; supplying third silica powder on an inner surface side of a layer made of the mullite material powder and the second silica powder; heating and fusing the mullite material powder, the second silica powder, and the third silica powder to form an opaque vitreous silica layer provided on the outer surface of the crucible, a transparent vitreous silica layer provided on an inner surface side of the crucible, and a mullite reinforcement layer provided on the outer surface side of an upper end portion of the crucible.
Abstract translation: 制造复合坩埚的方法包括：将莫来石材料粉末供给到模具的上部区域，并且在旋转模具的同时将第二二氧化硅粉末供给到设置在上部区域下方的下部区域; 在由莫来石材料粉末和第二二氧化硅粉末制成的层的内表面侧上供给第二二氧化硅粉末; 加热熔融莫来石材料粉末，第二二氧化硅粉末和第三二氧化硅粉末，以形成设置在坩埚外表面上的不透明玻璃状二氧化硅层，设置在坩埚内表面侧的透明氧化硅玻璃层，以及 在所述坩埚的上端部的外表面侧设置的莫来石加强层。
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公开(公告)号：US09863061B2
公开(公告)日：2018-01-09
申请号：US15103639
申请日：2014-12-25
Applicant: SUMCO CORPORATION
Inventor： Toshiaki Sudo , Tadahiro Sato , Ken Kitahara , Eriko Kitahara
CPC classification number: C30B15/10 , C03B19/095 , C30B29/06 , C30B35/002 , Y02P40/57
Abstract: In an embodiment, a vitreous silica crucible 1 includes a cylindrical straight body portion 10a, a corner portion 10c formed at lower end of the straight body portion 10a, and a bottom portion 10b connected with the straight body portion 10a via the corner portion 10c. Moreover, the vitreous silica crucible 1 includes a bubble-containing opaque layer 11 constituting an outer layer, and a bubble-free transparent layer 12 constituting an inner layer. A boundary surface, between the opaque layer 11 and the transparent layer 12 in at least the straight body portion 10a, forms a periodic wave surface in a vertical direction. The vitreous silica crucible can suppress deformation under high temperature.
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公开(公告)号：US09810526B2
公开(公告)日：2017-11-07
申请号：US14365544
申请日：2012-10-31
Applicant: SUMCO CORPORATION
Inventor： Toshiaki Sudo , Tadahiro Sato , Ken Kitahara
CPC classification number: G01B11/24 , C03B19/095 , C30B15/10 , C30B15/20 , C30B15/26 , C30B29/06 , H01L22/12
Abstract: A method for measuring a three-dimensional shape of an inner surface of a vitreous silica crucible which enables the measurement of the three-dimensional shape of the inner surface of the crucible without contaminating the inner surface of the crucible, is provided. According to the present invention, a method for measuring a three-dimensional shape of a vitreous silica crucible, including a fogging step to form a fog onto an inner surface of the vitreous silica crucible, a three-dimensional shape measuring step to measure a three-dimensional shape of the inner surface, by measuring a reflected light from the inner surface irradiated with light, is provided.
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公开(公告)号：US09758900B2
公开(公告)日：2017-09-12
申请号：US14369151
申请日：2012-10-31
Applicant: SUMCO Corporation
Inventor： Toshiaki Sudo , Tadahiro Sato , Ken Kitahara , Takuma Yoshioka , Hiroshi Kishi
CPC classification number: C30B15/10 , C03B19/095 , C30B11/002 , C30B29/06 , C30B35/002 , Y10T117/1032
Abstract: Buckling of a vitreous silica crucible 12 or inward fall of a sidewall 15 is effectively suppressed. The vitreous silica crucible 12 includes the cylindrical sidewall 15 having an upward-opening rim, a mortar-shaped bottom 16 including a curve, and a round portion 17 connecting the sidewall 15 and the bottom 16. In the vitreous silica crucible 12 the per-unit area thermal resistance in the thickness direction of the sidewall 15 is higher than that of the round portion 17.
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