Invention Grant
- Patent Title: High brightness laser-sustained plasma broadband source
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Application No.: US15842540Application Date: 2017-12-14
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Publication No.: US10032619B2Publication Date: 2018-07-24
- Inventor: Yung-Ho Alex Chuang , Xiaoxu Lu , Justin Liou , John Fielden
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01J61/16 ; G02B5/32 ; H01J61/02 ; H05H1/24 ; H01J61/20

Abstract:
A high brightness laser-sustained broadband light source includes a gas containment structure and a pump laser configured to generate a pump beam including illumination of a wavelength at least proximate to a weak absorption line of a neutral gas contained in the gas containment structure. The broadband light source includes one or more anamorphic illumination optics configured to focus the pump beam into an approximately elliptical beam waist positioned in or proximate to the center of the gas containment structure. The broadband light source includes one or more first collection optics configured to collect broadband radiation emitted by the plasma in a direction substantially aligned with a longer axis of the elliptical beam waist.
Public/Granted literature
- US20180114687A1 High Brightness Laser-Sustained Plasma Broadband Source Public/Granted day:2018-04-26
Information query
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