Invention Grant
- Patent Title: Method for treating a semiconductor device
-
Application No.: US15704695Application Date: 2017-09-14
-
Publication No.: US10041904B2Publication Date: 2018-08-07
- Inventor: James Ball , Brian Reed
- Applicant: LIFE TECHNOLOGIES CORPORATION
- Applicant Address: US CA Carlsbad
- Assignee: LIFE TECHNOLOGIES CORPORATION
- Current Assignee: LIFE TECHNOLOGIES CORPORATION
- Current Assignee Address: US CA Carlsbad
- Main IPC: B08B3/04
- IPC: B08B3/04 ; G01N27/414 ; B08B3/08 ; C11D7/34 ; C11D7/50 ; B08B9/08 ; C11D3/34 ; C11D3/16 ; C11D3/43

Abstract:
A sensor array includes a plurality of sensors. A sensor of the plurality of sensors has a sensor pad exposed at a surface of the sensor array. A method of treating the sensor array includes exposing at least the sensor pad to a wash solution including sulfonic acid and an organic solvent and rinsing the wash solution from the sensor pad.
Public/Granted literature
- US20180003672A1 METHOD FOR TREATING A SEMICONDUCTOR DEVICE Public/Granted day:2018-01-04
Information query
IPC分类: