Invention Grant
- Patent Title: Die-sized atomic magnetometer and method of forming the magnetometer
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Application No.: US14923764Application Date: 2015-10-27
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Publication No.: US10042009B2Publication Date: 2018-08-07
- Inventor: Philipp Lindorfer , Peter J Hopper , William French , Paul Mawson , Steven Hunt , Roozbeh Parsa
- Applicant: National Semiconductor Corporation
- Applicant Address: US CA Santa Clara
- Assignee: National Semiconductor Corporation
- Current Assignee: National Semiconductor Corporation
- Current Assignee Address: US CA Santa Clara
- Agent Jacqueline J. Garner; Charles A. Brill; Frank D. Cimino
- Main IPC: G01R33/00
- IPC: G01R33/00 ; G01R33/032 ; H01L43/12 ; H01L31/18 ; H01S5/02 ; H01S5/026 ; H01S5/022 ; G01J1/44 ; G01J5/20 ; G01J1/42 ; H01S5/183
Abstract:
The cost and size of an atomic magnetometer are reduced by attaching together a first die which integrates together a vapor cell, top and side photo detectors, and processing electronics, a second die which integrates together an optics package and a heater for the vapor cell, and a third die which integrates together a VCSEL, a heater for the VCSEL, and control electronics.
Public/Granted literature
- US20160054398A1 DIE-SIZED ATOMIC MAGNETOMETER AND METHOD OF FORMING THE MAGNETOMETER Public/Granted day:2016-02-25
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