Invention Grant
- Patent Title: Measuring arrangement for reflection measurement
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Application No.: US15328523Application Date: 2015-06-22
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Publication No.: US10054484B2Publication Date: 2018-08-21
- Inventor: Jörg Margraf , Jens Mondry
- Applicant: Carl Zeiss Spectroscopy GmgH
- Applicant Address: DE Jena
- Assignee: CARL ZEISS SPECTROSCOPY GMBH
- Current Assignee: CARL ZEISS SPECTROSCOPY GMBH
- Current Assignee Address: DE Jena
- Agency: Nixon Peabody LLP
- Agent Jeffrey L. Costellia
- Priority: DE102014215193 20140801
- International Application: PCT/EP2015/063898 WO 20150622
- International Announcement: WO2016/015921 WO 20160204
- Main IPC: G01N21/55
- IPC: G01N21/55 ; G01J3/02 ; G01N21/47 ; G01N21/27 ; G01N21/86 ; G01J3/50

Abstract:
The invention relates to a measuring arrangement for detecting an absolute reflection spectrum of a sample in a process for producing the sample. It comprises a light source for generating measurement light, a homogenizer for generating a uniform spatial illuminance distribution of the measurement light; a movable reflector and a receiver for collecting the measurement light reflected from the sample and/or the reflector. According to the invention, the reflector both for a reference measurement and for a sample measurement is positioned in an observation beam path and arranged on the same side of the sample as the light source in order to feed the reflected measurement light to the receiver.
Public/Granted literature
- US20170211975A1 MEASURING ARRANGEMENT FOR REFLECTION MEASUREMENT Public/Granted day:2017-07-27
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