Invention Grant
- Patent Title: Method and equipment based on multi-core fiber Bragg grating probe for measuring structures of a micro part
-
Application No.: US15112179Application Date: 2014-12-25
-
Publication No.: US10060723B2Publication Date: 2018-08-28
- Inventor: Jiwen Cui , Kunpeng Feng , Junying Li , Jiubin Tan
- Applicant: Harbin Institute of Technology
- Applicant Address: CN Nangang District, Harbin, Heilongjiang
- Assignee: HARBIN INSTITUTE OF TECHNOLOGY
- Current Assignee: HARBIN INSTITUTE OF TECHNOLOGY
- Current Assignee Address: CN Nangang District, Harbin, Heilongjiang
- Agency: Global IP Services
- Agent Tianhua Gu
- Priority: CN201410030736 20140117; CN201410030737 20140117; CN201410030738 20140117; CN201410030739 20140117; CN201410030740 20140117
- International Application: PCT/CN2014/094987 WO 20141225
- International Announcement: WO2015/106621 WO 20150723
- Main IPC: G01B11/00
- IPC: G01B11/00 ; G01B5/012 ; G01B11/16 ; G01D5/353

Abstract:
A method and equipment based on multi-core fiber Bragg grating (FBG) probe for measuring structures of a micro part are provided. The provided method relates to how to accomplish measuring structures of a micro part by transforming two or three-dimensional contact displacements into spectrum shifts of the multi-core FBG probe, and to reconstruct the structure geometry of a micro part. The provided equipment can be used to bring the spherical tip of the multi-core FBG probe into contact with a micro part, to determine coordinates of contact points, and to reconstruct the structure geometry of a micro part. The provided method and equipment feature high sensitivity, low probing force, high inspecting aspect ratio and immunity to environment interference.
Public/Granted literature
Information query