Translation mirror based beam steering mechanism with ultrahigh frequency response and high sensitivity
    1.
    发明授权
    Translation mirror based beam steering mechanism with ultrahigh frequency response and high sensitivity 有权
    具有超高频响应和高灵敏度的平移镜基光束转向机构

    公开(公告)号:US09383574B2

    公开(公告)日:2016-07-05

    申请号:US13980036

    申请日:2012-09-28

    Abstract: This invention relates to a beam steering mechanism with ultrahigh frequency response and high sensitivity, which is based on the translation of two mirrors. Beam steering is achieved by the translations of two mirrors in the X axial mirror group and Y axial mirror group. The two translation mirrors are located at the output ends of two PZT actuators, and are directly actuated by the two PZT actuators. The dynamic characteristics of the two translation mirrors are always exactly the same as the output characteristics of the PZT actuators. There is no mechanical translation loss in this beam steering mechanism, and so, the beam steering mechanism has an ultrahigh frequency response and high angular deflection sensitivity.

    Abstract translation: 本发明涉及一种具有超高频响应和高灵敏度的光束转向机构,其基于两个反射镜的平移。 光束转向通过X轴反射镜组和Y轴反射镜组中的两个反射镜的平移来实现。 两个平移反射镜位于两个PZT执行器的输出端,并由两个PZT执行器直接驱动。 两个平移反射镜的动态特性总是与PZT执行器的输出特性完全相同。 在该光束转向机构中没有机械平移损耗,因此,光束转向机构具有超高频响应和高角度偏转灵敏度。

    Fabrication method of multi-core fiber Bragg grating probe used for measuring structures of a micro part based on the capillary self-assemble technique

    公开(公告)号:US10481325B2

    公开(公告)日:2019-11-19

    申请号:US15503836

    申请日:2016-03-02

    Abstract: A fabrication method of a multi-core fiber Bragg grating (FBG) probe for measuring structures of a micro part based on the capillary self-assembly technique, wherein the diameter of the fiber (6) inscribed with FBG is reduced using a mechanical method or an etch method by the hydrofluoric acid; the fibers (6) inscribed with FBG, whose diameter has been reduced, are inserted into a tube (7) through its terminal with an inner taper angle; the FBG terminals of these fibers (6) are immersed into the UV adhesive (10) of a low viscosity and the UV adhesive (10) is raised in the gaps between the fibers (6); or the UV adhesive is dropped on these fibers (6) and the capillary bridge between the fibers (6) is formed; a most compact structure of the fiber bundle is formed as a result of the capillary self-assembly; the fiber bundle is cured using a UV light and the multi-core FBG (11) is therefore formed; the terminal of the multi-core FBG (11) is polished with an optic fiber polishing machine and then a spherical tip is fabricated with the melting fiber method or the installation method of a micro ball; therefore, a multi-core FBG (11) probe can be achieved. The method features low crosstalk between signal of FBG, inexpensive and low insertion loss.

    Method And Equipment Based On Detecting The Polarization Property Of A Polarization Maintaining Fiber Probe For Measuring Structures Of A Micro Part
    6.
    发明申请
    Method And Equipment Based On Detecting The Polarization Property Of A Polarization Maintaining Fiber Probe For Measuring Structures Of A Micro Part 有权
    基于检测微零件测量结构的偏振维持光纤探头的极化性能的方法和设备

    公开(公告)号:US20160305764A1

    公开(公告)日:2016-10-20

    申请号:US15101905

    申请日:2014-12-31

    CPC classification number: G01B11/007 G01B5/012 G01B11/18

    Abstract: A method and equipment based on detecting the polarization property of a polarization maintaining fiber (PMF) probe for measuring structures of a micro part are provided. The provided method relates to how to accomplish measuring structures of a micro part by transforming two or three-dimensional contact displacements into polarization property changes of the PMF probe, and how to reconstruct the structure geometry of a micro part. The provided equipment can be used to bring the spherical tip of the PMF probe into contact with a micro part, to determine coordinates of contact points, and to reconstruct the structure geometry of a micro part. The provided method and equipment feature high sensitivity, low probing force, high inspecting aspect ratio and immunity to environment interference.

    Abstract translation: 提供了一种基于检测用于测量微型部件的结构的偏振保持光纤(PMF)探针的偏振特性的方法和设备。 提供的方法涉及如何通过将二维或三维接触位移转换为PMF探针的偏振特性变化以及如何重建微型部件的结构几何形状来实现微型部件的测量结构。 所提供的设备可用于使PMF探针的球形尖端与微型部件接触,以确定接触点的坐标,并重建微型部件的结构几何形状。 提供的方法和设备具有灵敏度高,探测力低,检测宽高比和对环境干扰的抵抗能力。

    Translation Mirror Based Beam Steering Mechanism With Ultrahigh Frequency Response And High Sensitivity
    7.
    发明申请
    Translation Mirror Based Beam Steering Mechanism With Ultrahigh Frequency Response And High Sensitivity 有权
    具有超高频响应和高灵敏度的基于反射镜的光束转向机构

    公开(公告)号:US20140198367A1

    公开(公告)日:2014-07-17

    申请号:US13980036

    申请日:2012-09-28

    Abstract: This invention relates to a beam steering mechanism with ultrahigh frequency response and high sensitivity, which is based on the translation of two mirrors. Beam steering is achieved by the translations of two mirrors in the X axial mirror group and Y axial mirror group. The two translation mirrors are located at the output ends of two PZT actuators, and are directly actuated by the two PZT actuators. The dynamic characteristics of the two translation mirrors are always exactly the same as the output characteristics of the PZT actuators. There is no mechanical translation loss in this beam steering mechanism, and so, the beam steering mechanism has an ultrahigh frequency response and high angular deflection sensitivity.

    Abstract translation: 本发明涉及一种具有超高频响应和高灵敏度的光束转向机构,其基于两个反射镜的平移。 光束转向通过X轴反射镜组和Y轴反射镜组中的两个反射镜的平移来实现。 两个平移反射镜位于两个PZT执行器的输出端,并由两个PZT执行器直接驱动。 两个平移反射镜的动态特性总是与PZT执行器的输出特性完全相同。 在该光束转向机构中没有机械平移损耗,因此,光束转向机构具有超高频响应和高角度偏转灵敏度。

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