Invention Grant
- Patent Title: Measurement device, method, and recording medium
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Application No.: US13860034Application Date: 2013-04-10
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Publication No.: US10067057B2Publication Date: 2018-09-04
- Inventor: Eiji Kato
- Applicant: ADVANTEST CORPORATION
- Applicant Address: JP Tokyo
- Assignee: ADVANTEST CORPORATION
- Current Assignee: ADVANTEST CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2012-099444 20120425
- Main IPC: G01N21/59
- IPC: G01N21/59 ; G01N3/40 ; G01N15/08 ; G01N21/3581 ; G01N33/15 ; G01N3/06 ; G01N15/00 ; G01N9/24 ; G01N21/95

Abstract:
According to the present invention, a measurement device includes an electromagnetic wave detector, a phase measurement unit and a deriving unit. The electromagnetic wave detector detects an electromagnetic wave having a frequency equal to or more than 0.02 THz and equal to or less than 12 THz having traveled inside an object to be measured, which is an aggregation of particles. The phase measurement unit measures a change in phase of the electromagnetic wave generated by the travel inside the object to be measured based on a detection result by the electromagnetic wave detector. The deriving unit derives hardness or porosity of the object to be measured based on a measurement result by the phase measurement unit.
Public/Granted literature
- US20130284930A1 MEASUREMENT DEVICE, METHOD, AND RECORDING MEDIUM Public/Granted day:2013-10-31
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