Integrated chromatic confocal sensor
Abstract:
A confocal chromatic device is provided, including at least one chromatic lens with an extended axial chromatism; at least one broadband light source; at least one optical detector; and at least one measurement channel with a planar Y-junction made with a planar waveguide optics technology, and arranged for transferring light from the at least one light source towards the at least one chromatic lens and for transferring light reflected back through the at least one chromatic lens towards the at least one optical detector.
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