Invention Grant
- Patent Title: Microelectronic substrate electro processing system
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Application No.: US15190370Application Date: 2016-06-23
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Publication No.: US10087544B2Publication Date: 2018-10-02
- Inventor: Robert B. Moore , David Silvetti , Paul Wirth , Randy Harris
- Applicant: APPLIED Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Perkins Coie LLP
- Agent Kenneth H. Ohriner
- Main IPC: C25D7/12
- IPC: C25D7/12 ; C25D17/00 ; C25D17/06 ; H01L21/687 ; H01L21/768

Abstract:
In a processing system for electroplating semiconductor wafers and similar substrates, the contact ring of the electroplating processor is removed from the rotor of the processor and replaced with a previously deplated contact ring. This allows the contact ring to be deplated in ring service module of the system, while the processor continues to operate. Wafer throughput is improved. The contact ring may be attached to a chuck for moving the contact ring between the processors and the ring service module, with the chuck quickly attachable and releasable to the rotor.
Public/Granted literature
- US20160298255A1 MICROELECTRONIC SUBSTRATE ELECTRO PROCESSING SYSTEM Public/Granted day:2016-10-13
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