Unevenness inspection system, unevenness inspection method, and unevenness inspection program
Abstract:
An unevenness inspection system includes an image pickup section configured to acquire a picked-up image of an inspection target, an image generation section configured to generate a color-unevenness inspection image and a luminance-unevenness inspection image, based on the picked-up image, a calculation section configured to use both of the color-unevenness inspection image and the luminance-unevenness inspection image to calculate an evaluation parameter, and an inspection section configured to use the calculated evaluation parameter to perform unevenness inspection. The image generation section generates the color-unevenness inspection image and the luminance-unevenness inspection image, based on a filter-processed color-component image and a filter-processed luminance-component image. The calculation section calculates the evaluation parameter in consideration of unevenness visibility with respect to both of color and luminance.
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