Invention Grant
- Patent Title: Modular tubular susceptor
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Application No.: US14404948Application Date: 2013-06-03
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Publication No.: US10094016B2Publication Date: 2018-10-09
- Inventor: Torsten Kornmeyer , Meinhard Wisskirchen , Steffen Still
- Applicant: KGT Graphit Technologie GmbH
- Applicant Address: DE Windhagen
- Assignee: KGT Graphit Technologie GmbH
- Current Assignee: KGT Graphit Technologie GmbH
- Current Assignee Address: DE Windhagen
- Agency: Reising Ethington P.C.
- Priority: DE102012209278 20120601
- International Application: PCT/EP2013/061384 WO 20130603
- International Announcement: WO2013/178824 WO 20131205
- Main IPC: H01L21/673
- IPC: H01L21/673 ; C23C14/50 ; H01L21/67 ; C23C16/458 ; C23C14/56 ; B05C13/02

Abstract:
The invention relates to a susceptor which is for the processing chamber of protective gas and vacuum high-temperature processing installations and consists of graphite or CFC, has a tunnel-like design, and can be closed by a cover at both its ends. The invention should allow the provision of a flexibly and modularly extendable susceptor that has a material-saving design and, in particular, uniform thermal expansion. This is achieved by virtue of the fact that said susceptor (1) consists of a plurality of modules (2) aligned one next to the other along a continuous tunnel, that each module (2) consists of a tubular section (3) and a base panel (4) fixed thereto, and that the end faces (5) between each pair of modules (2) are interconnected in a form-fitting manner.
Public/Granted literature
- US20150144057A1 SUSCEPTOR Public/Granted day:2015-05-28
Information query
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