Invention Grant
- Patent Title: Production method for a detection apparatus and detection apparatuses
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Application No.: US15408961Application Date: 2017-01-18
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Publication No.: US10094725B2Publication Date: 2018-10-09
- Inventor: Jochen Reinmuth , Timo Lindemann
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: ROBERT BOSCH GMBH
- Current Assignee: ROBERT BOSCH GMBH
- Current Assignee Address: DE Stuttgart
- Agency: Norton Rose Fulbright US LLP
- Agent Gerard Messina
- Priority: DE102016200699 20160120
- Main IPC: G01L9/00
- IPC: G01L9/00 ; H01L21/00 ; H01L21/66 ; B81B7/00 ; B81C99/00 ; G01L19/14 ; G01N33/00 ; H01L21/56 ; H01L23/00 ; H01L25/16 ; H01L25/00 ; H01L23/31

Abstract:
A production method for a detection apparatus includes: forming at least one sensitive region having at least one exposed sensing area on and/or in a semiconductor substrate, encapsulating at least one part of the semiconductor substrate so that the at least one sensing area is sealed in an air-, liquid- and/or particle-tight fashion from an external environment, and forming at least one opening so that at least one air, liquid and/or particle access from the external environment to the at least one sensing area is created, wherein before forming the at least one opening, at least one first test and/or calibration measurement is performed, for which at least one sensor signal of the at least one sensitive region having the at least one sensing area sealed in an air-, liquid- and/or particle-tight fashion is determined as at least one first test and/or calibration signal. Also described are related detection apparatuses.
Public/Granted literature
- US20170205301A1 PRODUCTION METHOD FOR A DETECTION APPARATUS AND DETECTION APPARATUSES Public/Granted day:2017-07-20
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