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公开(公告)号：US20190391029A1
公开(公告)日：2019-12-26
申请号：US16481369
申请日：2018-01-30
Applicant: Robert Bosch GmbH
Inventor： Cristian Nagel , Frederik Ante , Sebastian Schuler-Watkins , Timo Lindemann
Abstract: A micromechanical sensor device is described that includes an integrated housing seal, a micromechanical sensor assembly, and a corresponding manufacturing method. The micromechanical sensor device with an integrated housing seal is equipped with a micromechanical sensor chip that includes an upper side and a lower side, a sensor area that may be brought into contact with an environmental medium being provided on or at the upper side, and is equipped with at least one circumferential trench, open toward the upper side, that is provided in the periphery of the sensor area and that is at least partly filled with a sealing medium for sealing a corresponding area of a housing to be mounted thereon.
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2.发明申请公开(公告)号：US20200225108A1
公开(公告)日：2020-07-16
申请号：US16330552
申请日：2017-08-24
Applicant: Robert Bosch GmbH
Inventor： Heiko Stahl , Arne Dannenberg , Daniel Haug , Daniel Kaercher , Michaela Mitschke , Mike Schwarz , Timo Lindemann
Abstract: A method for manufacturing a micromechanical component having a disengaged pressure sensor device includes: configuring an electrically conductive sacrificial element in or on a first outer surface of a first substrate; applying a second substrate on or upon the outer surface of the first substrate over the sacrificial element; configuring a pressure sensor device by anodic etching of the second substrate; configuring in the second substrate at least one trench that extends to the sacrificial element; and at least partly removing the sacrificial element in order to disengage the pressure sensor device.
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公开(公告)号：US10775253B2
公开(公告)日：2020-09-15
申请号：US16330552
申请日：2017-08-24
Applicant: Robert Bosch GmbH
Inventor： Heiko Stahl , Arne Dannenberg , Daniel Haug , Daniel Kaercher , Michaela Mitschke , Mike Schwarz , Timo Lindemann
Abstract: A method for manufacturing a micromechanical component having a disengaged pressure sensor device includes: configuring an electrically conductive sacrificial element in or on a first outer surface of a first substrate; applying a second substrate on or upon the outer surface of the first substrate over the sacrificial element; configuring a pressure sensor device by anodic etching of the second substrate; configuring in the second substrate at least one trench that extends to the sacrificial element; and at least partly removing the sacrificial element in order to disengage the pressure sensor device.
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公开(公告)号：US20200255285A1
公开(公告)日：2020-08-13
申请号：US16733891
申请日：2018-06-27
Applicant: Robert Bosch GmbH
Inventor： Christian Doering , Christoph Schelling , Franziska Rohlfing , Johannes Kenntner , Thomas Friedrich , Timo Lindemann
Abstract: A micromechanical sensor device and a corresponding production method, in which the micromechanical sensor device is equipped with a sensor substrate having a front side and a rear side, a sensor region provided on the front side that can be brought into contact with an environmental medium, and a capping device, attached on the front side, for capping the sensor region. In the capping device and/or in the sensor substrate, one or more capillaries are formed for conducting the environmental medium onto the sensor region, a liquid-repellent layer being provided at least in some regions on the inner walls of the capillaries.
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公开(公告)号：US11085846B2
公开(公告)日：2021-08-10
申请号：US16481369
申请日：2018-01-30
Applicant: Robert Bosch GmbH
Inventor： Cristian Nagel , Frederik Ante , Sebastian Schuler-Watkins , Timo Lindemann
Abstract: A micromechanical sensor device is described that includes an integrated housing seal, a micromechanical sensor assembly, and a corresponding manufacturing method. The micromechanical sensor device with an integrated housing seal is equipped with a micromechanical sensor chip that includes an upper side and a lower side, a sensor area that may be brought into contact with an environmental medium being provided on or at the upper side, and is equipped with at least one circumferential trench, open toward the upper side, that is provided in the periphery of the sensor area and that is at least partly filled with a sealing medium for sealing a corresponding area of a housing to be mounted thereon.
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Patent Agency Ranking
公开(公告)号：US20170288346A1
公开(公告)日：2017-10-05
申请号：US15509223
申请日：2015-07-24
Applicant: Robert Bosch GmbH
Inventor： Andreas Wirnitzer , Roland Seitz , Timo Lindemann , Wolfgang Woernle
Abstract: A plug module includes a sensor device and a plug housing, the plug housing including a socket, an inner side of which includes a receptacle area for accommodating the sensor device, and a cover that is connected to the socket with the aid of a fastening device, where a plurality of electrically conductive straight contact pins are introduced into the cover in such a way that (a) particular first ends of the contact pins protrude into an internal volume of the plug housing and are situated above the receptacle area of the socket, and (b) particular second ends of the contact pins are situated in the area of a connector of the cover.
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公开(公告)号：US20170197824A1
公开(公告)日：2017-07-13
申请号：US15396867
申请日：2017-01-03
Applicant: Robert Bosch GmbH
Inventor： Florian Grabmaier , Eckart Schellkes , Timo Lindemann
IPC: B81C1/00
CPC classification number: B81C1/00333 , B81B7/0061 , B81B2201/0264 , B81B2207/012 , B81C1/00309 , B81C2203/0136 , B81C2203/0154 , B81C2203/0792 , G01L19/141
Abstract: A method for producing a pressure sensor comprises providing a substrate with a depression; attaching a micromechanical sensor element to the substrate in the depression; attaching an evaluation circuit to the substrate next to the depression; electrically connecting the evaluation circuit to the sensor element; covering the substrate around the depression by means of a potting die such that the depression is closed; potting the evaluation circuit between the substrate and the potting die; and removing the potting die.
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公开(公告)号：US10777944B2
公开(公告)日：2020-09-15
申请号：US15509223
申请日：2015-07-24
Applicant: Robert Bosch GmbH
Inventor： Andreas Wirnitzer , Roland Seitz , Timo Lindemann , Wolfgang Woernle
Abstract: A plug module includes a sensor device and a plug housing, the plug housing including a socket, an inner side of which includes a receptacle area for accommodating the sensor device, and a cover that is connected to the socket with the aid of a fastening device, where a plurality of electrically conductive straight contact pins are introduced into the cover in such a way that (a) particular first ends of the contact pins protrude into an internal volume of the plug housing and are situated above the receptacle area of the socket, and (b) particular second ends of the contact pins are situated in the area of a connector of the cover.
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公开(公告)号：US10094725B2
公开(公告)日：2018-10-09
申请号：US15408961
申请日：2017-01-18
Applicant: Robert Bosch GmbH
Inventor： Jochen Reinmuth , Timo Lindemann
IPC: G01L9/00 , H01L21/00 , H01L21/66 , B81B7/00 , B81C99/00 , G01L19/14 , G01N33/00 , H01L21/56 , H01L23/00 , H01L25/16 , H01L25/00 , H01L23/31
Abstract: A production method for a detection apparatus includes: forming at least one sensitive region having at least one exposed sensing area on and/or in a semiconductor substrate, encapsulating at least one part of the semiconductor substrate so that the at least one sensing area is sealed in an air-, liquid- and/or particle-tight fashion from an external environment, and forming at least one opening so that at least one air, liquid and/or particle access from the external environment to the at least one sensing area is created, wherein before forming the at least one opening, at least one first test and/or calibration measurement is performed, for which at least one sensor signal of the at least one sensitive region having the at least one sensing area sealed in an air-, liquid- and/or particle-tight fashion is determined as at least one first test and/or calibration signal. Also described are related detection apparatuses.
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公开(公告)号：US09957158B2
公开(公告)日：2018-05-01
申请号：US15396867
申请日：2017-01-03
Applicant: Robert Bosch GmbH
Inventor： Florian Grabmaier , Eckart Schellkes , Timo Lindemann
CPC classification number: B81C1/00333 , B81B7/0061 , B81B2201/0264 , B81B2207/012 , B81C1/00309 , B81C2203/0136 , B81C2203/0154 , B81C2203/0792 , G01L19/141
Abstract: A method for producing a pressure sensor comprises providing a substrate with a depression; attaching a micromechanical sensor element to the substrate in the depression; attaching an evaluation circuit to the substrate next to the depression; electrically connecting the evaluation circuit to the sensor element; covering the substrate around the depression by means of a potting die such that the depression is closed; potting the evaluation circuit between the substrate and the potting die; and removing the potting die.
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