Invention Grant
- Patent Title: Multi-surface specular reflection inspector
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Application No.: US15159626Application Date: 2016-05-19
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Publication No.: US10094787B2Publication Date: 2018-10-09
- Inventor: Steven W. Meeks , Rusmin Kudinar , Ronny Soetarman , Hung P. Nguyen
- Applicant: Zeta Instruments, Inc.
- Applicant Address: US CA Milpitas
- Assignee: KLA-TENCOR CORPORATION
- Current Assignee: KLA-TENCOR CORPORATION
- Current Assignee Address: US CA Milpitas
- Agency: Imperium Patent Works LLP
- Agent Mark D. Marrello
- Main IPC: G01N21/00
- IPC: G01N21/00 ; G01N21/958 ; G01N21/21 ; G01N21/55

Abstract:
An optical inspector includes a time varying beam reflector, a radiating source that irradiates the time varying beam reflector, a telecentric scan lens configured to direct the radiation reflected by the time varying beam reflector onto a first surface of a transparent sample, a first detector that receives at least a portion of top surface specular reflection, a second detector that receives at least a portion of the bottom surface specular reflection. A turning mirror may also be included. The turning mirror is a switchable mirror that can be adjusted to a first position where the turning mirror reflects the top and bottom surface specular reflection, and can be adjusted to a second position where the turning mirror does not reflect the top or the bottom surface specular reflection. A first and second polarizing element may also be included to detect additional types of defects on either surface.
Public/Granted literature
- US20170336331A1 MULTI-SURFACE SPECULAR REFLECTION INSPECTOR Public/Granted day:2017-11-23
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