Invention Grant
- Patent Title: Radiation detector comprising a compensating sensor
-
Application No.: US14951554Application Date: 2015-11-25
-
Publication No.: US10096724B2Publication Date: 2018-10-09
- Inventor: Carl Van Buggenhout , Appolonius Jacobus Van Der Wiel , Luc Buydens
- Applicant: Melexis Technologies NV
- Applicant Address: BE Tessenderlo
- Assignee: MELEXIS TECHNOLOGIES NV
- Current Assignee: MELEXIS TECHNOLOGIES NV
- Current Assignee Address: BE Tessenderlo
- Agency: Workman Nydegger
- Priority: GB1420907.6 20141125
- Main IPC: H01L31/02
- IPC: H01L31/02 ; B81B7/02 ; G01J5/12 ; H01L31/0203 ; G01J5/04 ; G01J5/08 ; G01J1/02 ; G01J5/02 ; G01J5/06 ; G01J1/42 ; H01L31/0216 ; H01L27/144 ; H01L31/09 ; H01L35/28 ; H01L35/34

Abstract:
A chip for radiation measurements, the chip comprising a first substrate comprising a first sensor and a second sensor. The chip moreover comprises a second substrate comprising a first cavity and a second cavity both with oblique walls. An internal layer is present on the inside of the second cavity. The second substrate is sealed to the first substrate with the cavities on the inside such that the first cavity is above the first sensor and the second cavity is above the second sensor.
Public/Granted literature
- US20160149105A1 RADIATION DETECTOR COMPRISING A COMPENSATING SENSOR Public/Granted day:2016-05-26
Information query
IPC分类: