Invention Grant
- Patent Title: Extreme ultraviolet light generating apparatus
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Application No.: US15953774Application Date: 2018-04-16
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Publication No.: US10102938B2Publication Date: 2018-10-16
- Inventor: Takayuki Yabu , Tamotsu Abe , Kenichi Miyao , Tooru Abe
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: WOPCT/JP2015/080971 20151103
- Main IPC: G21K1/06
- IPC: G21K1/06 ; H05G2/00 ; G03F7/00 ; G03F7/20

Abstract:
An extreme ultraviolet light generating apparatus may include a chamber including a window to allow first and second pulse laser beams to enter, a mirror to reflect the first pulse laser beam, a first actuator to control a position or a posture of the mirror, a beam combiner to cause optical paths of the first and second pulse laser beams to substantially coincide with each other, a reflective optical system to reflect the first and second pulse laser beams from the beam combiner, a second actuator to control a position or a posture of the reflective optical system, sensors each configured to output data for detecting a position of an optical path of the first pulse laser beam, and a controller to control the first actuator based on the data and control the second actuator based on a value related to control of the first actuator.
Public/Granted literature
- US20180240562A1 EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS Public/Granted day:2018-08-23
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