Invention Grant
- Patent Title: Composite carrier for warpage management
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Application No.: US15050062Application Date: 2016-02-22
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Publication No.: US10109598B2Publication Date: 2018-10-23
- Inventor: Dyi-Chung Hu
- Applicant: Dyi-Chung Hu
- Agency: JCIPRNET
- Main IPC: B32B7/02
- IPC: B32B7/02 ; H01L23/00 ; H01L21/683 ; B32B7/12 ; H01L23/498 ; H01L21/48 ; H05K3/46 ; H05K3/00

Abstract:
A composite carrier is disclosed for warpage management as a temporary carrier in semiconductor process. Warpage is reduced for a product, semi-product, or build-up layer processed on the temporary composite carrier which is peeled off the temporary carrier in a later step. The composite carrier comprises a top substrate and a bottom substrate, an adhesive layer is configured in between the top substrate and a bottom substrate. One of the embodiments discloses the top substrate of the composite carrier having a lower CTE and the bottom substrate of the composite carrier having a higher CTE.
Public/Granted literature
- US20160254233A1 COMPOSITE CARRIER FOR WARPAGE MANAGEMENT Public/Granted day:2016-09-01
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