Invention Grant
- Patent Title: Electron microscope electron gun for facilitating position adjustment and electron microscope including same
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Application No.: US15576687Application Date: 2016-01-06
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Publication No.: US10128077B2Publication Date: 2018-11-13
- Inventor: Bok Lae Cho , In Young Park
- Applicant: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
- Applicant Address: KR Daejeon
- Assignee: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
- Current Assignee: KOREA RESEARCH INSTITUTE OF STANDARDS AND SCIENCE
- Current Assignee Address: KR Daejeon
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: KR10-2015-0145944 20151020; KR10-2015-0169681 20151201
- International Application: PCT/KR2016/000076 WO 20160106
- International Announcement: WO2017/069343 WO 20170427
- Main IPC: H01J37/06
- IPC: H01J37/06 ; H01J37/065 ; H01J37/26
Abstract:
The present invention relates to an electron gun for facilitating position adjustment, and an electron microscope including the same, the electron gun improving a vacuum structure so as to easily move a filament block or an electron tip of an electron gun without having bellows for maintaining a vacuum when the center axis of the filament block or the electron tip of the electron gun is mechanically misaligned with the center axis of a anode and a focusing lens.
Public/Granted literature
Information query
