Invention Grant
- Patent Title: High mobility strained channels for fin-based NMOS transistors
-
Application No.: US15117590Application Date: 2014-03-27
-
Publication No.: US10153372B2Publication Date: 2018-12-11
- Inventor: Stephen M. Cea , Roza Kotlyar , Harold W. Kennel , Glenn A. Glass , Anand S. Murthy , Willy Rachmady , Tahir Ghani
- Applicant: INTEL CORPORATION
- Applicant Address: US CA Santa Clara
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: US CA Santa Clara
- Agency: Finch & Maloney PLLC
- International Application: PCT/US2014/032039 WO 20140327
- International Announcement: WO2015/147836 WO 20151001
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L29/10 ; H01L27/092 ; H01L29/04 ; H01L29/06 ; H01L29/161 ; H01L29/165

Abstract:
Techniques are disclosed for incorporating high mobility strained channels into fin-based NMOS transistors (e.g., FinFETs such as double-gate, trigate, etc), wherein a stress material is cladded onto the channel area of the fin. In one example embodiment, a germanium or silicon germanium film is cladded onto silicon fins in order to provide a desired tensile strain in the core of the fin, although other fin and cladding materials can be used. The techniques are compatible with typical process flows, and cladding deposition can occur at a plurality of locations within typical process flow. In various embodiments, fins may be formed with a minimum width (or later thinned) so as to improve transistor performance. In some embodiments, a thinned fin also increases tensile strain across the core of a cladded fin. In some cases, strain in the core may be further enhanced by adding an embedded silicon epitaxial source and drain.
Public/Granted literature
- US20160351701A1 HIGH MOBILITY STRAINED CHANNELS FOR FIN-BASED NMOS TRANSISTORS Public/Granted day:2016-12-01
Information query
IPC分类: