Invention Grant
- Patent Title: Swellable film forming compositions and methods of nanoimprint lithography employing same
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Application No.: US15558384Application Date: 2016-04-25
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Publication No.: US10167546B2Publication Date: 2019-01-01
- Inventor: John T. Strand , David B. Olson
- Applicant: 3M INNOVATIVE PROPERTIES COMPANY
- Applicant Address: US MN St. Paul
- Assignee: 3M INNOVATIVE PROPERTIES COMPANY
- Current Assignee: 3M INNOVATIVE PROPERTIES COMPANY
- Current Assignee Address: US MN St. Paul
- Agent James A. Baker
- International Application: PCT/US2016/029101 WO 20160425
- International Announcement: WO2016/176129 WO 20161103
- Main IPC: C23C14/34
- IPC: C23C14/34 ; G03F7/00 ; B05D1/28 ; B05D3/00 ; B05D3/06 ; C23C14/02 ; C23C14/58 ; B29C41/00 ; C08J5/18 ; C08J7/12 ; C08F220/28 ; C09D4/00 ; G03F7/027 ; H01L21/027 ; B29L9/00
Abstract:
Compositions of matter capable of being cast and cured to form a microreplicated pattern on a substrate, and further capable of swelling on exposure to water so as to release from that substrate. Water swellable acrylic polymers formed from these compositions, and methods of using same in nanoimprint lithography are also disclosed.
Public/Granted literature
- US20180080119A1 SWELLABLE FILM FORMING COMPOSITIONS AND METHODS OF NANOIMPRINT LITHOGRAPHY EMPLOYING SAME Public/Granted day:2018-03-22
Information query
IPC分类:
