Invention Grant
- Patent Title: Method of assembly and manufacturing of piezo actuated Fabry-Perot interferometer
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Application No.: US15137810Application Date: 2016-04-25
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Publication No.: US10168214B2Publication Date: 2019-01-01
- Inventor: Sergey Etchin , Hod Finkelstein
- Applicant: TruTag Technologies, Inc.
- Applicant Address: US HI Kapolei
- Assignee: TruTag Technologies, Inc.
- Current Assignee: TruTag Technologies, Inc.
- Current Assignee Address: US HI Kapolei
- Agency: Van Pelt, Yi & James LLP
- Main IPC: G02B27/00
- IPC: G02B27/00 ; G01J3/45 ; G01J3/26 ; G02B26/00 ; G01B7/14
Abstract:
A device for tunable optical filter includes a substrate, one or more piezos, a bottom mirror, and a top mirror. The one or more piezos are placed on the substrate. The one or more piezos have a piezo thickness. The bottom mirror is placed on the substrate. The bottom mirror has a bottom mirror thickness greater than the piezo thickness. The top mirror is placed on the bottom mirror. The top mirror is attached to the one or more piezos.
Public/Granted literature
- US20160349423A1 METHOD OF ASSEMBLY AND MANUFACTURING OF PIEZO ACTUATED FABRY-PEROT INTERFEROMETER Public/Granted day:2016-12-01
Information query
