Invention Grant
- Patent Title: Bolometer fluid flow sensor
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Application No.: US15259106Application Date: 2016-09-08
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Publication No.: US10168349B2Publication Date: 2019-01-01
- Inventor: Seow Yuen Yee , Gary Yama , Thomas Rocznik
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot Moore & Beck LLP
- Main IPC: G01F1/68
- IPC: G01F1/68 ; G01P5/26 ; G01P13/00 ; G01J5/00 ; G01J5/04 ; G01J5/08 ; G01J5/02 ; G01J5/06 ; G01J5/20 ; G01F1/699 ; G01F1/684 ; G01F1/69 ; G01F1/696

Abstract:
A sensor comprises a substrate having a first surface; a cap structure connected to the substrate, the cap structure configured to define a cavity between an inner surface of the cap structure and the first surface of the substrate, the cap structure configured to block infrared radiation from entering the cavity from outside the cap structure; a plurality of absorbers, each absorber in the plurality of absorbers being connected to the first surface of the substrate and arranged at a respective position within the cavity and configured to absorb infrared radiation at the respective position within the cavity; and a plurality of readout circuits, each readout circuit in the plurality of readout circuits being connected to a respective absorber in the plurality of absorbers and configured to provide a measurement signal that indicates an amount of infrared radiation absorbed by the respective absorber.
Public/Granted literature
- US20180067143A1 BOLOMETER FLUID FLOW SENSOR Public/Granted day:2018-03-08
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