Invention Grant
- Patent Title: Capacitor structure compatible with nanowire CMOS
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Application No.: US14581043Application Date: 2014-12-23
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Publication No.: US10170537B2Publication Date: 2019-01-01
- Inventor: Kangguo Cheng , Bruce B. Doris , Pouya Hashemi , Ali Khakifirooz , Alexander Reznicek
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent L. Jeffrey Kelly
- Main IPC: B81B1/00
- IPC: B81B1/00 ; H01L27/06 ; H01L49/02 ; H01L29/06 ; H01L29/41

Abstract:
A semiconductor device is provided that includes a pedestal of an insulating material present over at least one layer of a semiconductor material, and at least one fin structure in contact with the pedestal of the insulating material. Source and drain region structures are present on opposing sides of the at least one fin structure. At least one of the source and drain region structures includes at least two epitaxial material layers. A first epitaxial material layer is in contact with the at least one layer of semiconductor material. A second epitaxial material layer is in contact with the at least one fin structure. The first epitaxial material layer is separated from the at least one fin structure by the second epitaxial material layer. A gate structure present on the at least one fin structure.
Public/Granted literature
- US20160181352A1 CAPACITOR STRUCTURE COMPATIBLE WITH NANOWIRE CMOS Public/Granted day:2016-06-23
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