Vibrator drive circuit
Abstract:
A vibrator drive circuit is configured to drive a vibrator mass 3 in a prescribed vibration direction. The vibrator drive circuit includes a drive unit configured to drive a vibrator based on a reference signal SG1 of a predetermined frequency to cause the vibrator to vibrate in a vibration direction, a phase detector configured to detect a vibration waveform of the vibrator in the vibration direction and to output an output voltage Vcnt in accordance with a phase difference between reference signal SG1 and a vibration waveform thereof, and two capacitors each formed of a movable electrode provided in the vibrator and a fixed electrode provided to face the movable electrode, the output voltage Vcnt being applied to the fixed electrode. The phase detector is configured to adjust the output voltage Vcnt in accordance with the phase difference, thereby changing electrostatic force in each of the capacitors for controlling the phase difference to be 90 degrees.
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