公开(公告)号：US20170073214A1

公开(公告)日：2017-03-16

申请号：US15363431

申请日：2016-11-29

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Junya Matsuoka ,  Nobuaki Tsuji ,  Yuki Ueya ,  Tsuyoshi Okami ,  Takashi Mizota

IPC: B81B3/00 ,  G01C19/5769 ,  G01P15/02 ,  B81C1/00

CPC classification number: B81B3/0013 ,  B81B3/001 ,  B81B3/0051 ,  B81B2201/0235 ,  B81B2201/0242 ,  B81C1/00968 ,  G01C19/5769 ,  G01P15/02 ,  H01L29/84

Abstract: A MEMS device including a fixed member and a movable member supported via a resilient body. The MEMS device includes an impact alleviation mechanism provided at a position where the movable member and the fixed member collide during operation. The impact alleviation mechanism includes a stopper provided to either the fixed member or the movable member and that protrude to be parallel between sides of the two members with at least one side edge fixed to the respective member. Moreover, the impact alleviation mechanism includes an elongate protruding member provided on the other of the fixed member and the movable member. The elongate protruding member and the stopper are configured such that as collision force increases between the movable member and the fixed member during operation, an abutment area of an outer edge position of the elongate protruding member approaches the fixed side edge of the stopper.

Abstract translation: 一种MEMS装置，包括固定构件和通过弹性体支撑的可动构件。 MEMS装置包括设置在可动件和固定件在操作期间碰撞的位置处的冲击减轻机构。 冲击减轻机构包括设置在固定构件或可动构件上的止动件，并且突出地平行于两个构件的侧面之间的至少一个侧边缘固定到相应构件。 此外，冲击缓解机构包括设置在固定构件和可动构件的另一个上的细长突出构件。 细长突出构件和止动件构造成使得在操作期间随着可移动构件和固定构件之间的碰撞力增加，细长突出构件的外边缘位置的邻接区域接近止动件的固定侧边缘。

公开(公告)号：US10190890B2

公开(公告)日：2019-01-29

申请号：US15209891

申请日：2016-07-14

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Tsuyoshi Okami

IPC: G01D5/24 ,  G01P15/125 ,  G01R27/26

Abstract: A capacitance-to-voltage conversion circuit including a variable capacitance element, an integration circuit, and first and second sample and hold circuits. Capacitance value of the variable capacitance element varies depending on a physical quantity. The integration circuit outputs a voltage as a result of integration. The first sample and hold circuit samples and holds the voltage. The second sample and hold circuit samples and holds the sampled voltage and performs a simultaneous sampling operation in synchronism with the first sample and hold circuit at the same period as at least an initial sampling period. The second sample and hold circuit performs a sampling operation at a rear-end period in a sampling period of the first sample and hold circuit other than the sampling period.

公开(公告)号：US09764943B2

公开(公告)日：2017-09-19

申请号：US15361972

申请日：2016-11-28

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Tsuyoshi Okami ,  Takashi Mizota ,  Yuki Ueya ,  Junya Matsuoka ,  Nobuaki Tsuji

IPC: B81B3/00 ,  G01C19/5762 ,  H01L41/113 ,  H01L41/12

CPC classification number: B81B3/0021 ,  B81B3/00 ,  B81B3/0045 ,  B81B2201/0228 ,  B81B2201/0242 ,  B81B2203/0154 ,  G01C19/5762 ,  H01L41/113 ,  H01L41/1132 ,  H01L41/125

Abstract: A MEMS structure includes a planar substrate, a support body coupled to the planar substrate, a fixed electrode coupled to the planar substrate and a moveable portion. The movable portion is spaced from and faces the fixed electrode. The movable electrode includes a movable weight and an intermediate frame surrounding an outer edge of the movable weight. A plurality of elastic supports connect the movable weight to the intermediate frame. The elastic supports are elastically deformable in a first direction extending parallel to the plane of the substrate such that the movable weight can move in the first direction. At least one torsion bar pivotally connects one end of the intermediate frame to the support body so as to allow the intermediate frame, and with it the movable weight, to pivot around an axis which extends parallel to the plane of the substrate and perpendicular to the first direction.

公开(公告)号：US20160377435A1

公开(公告)日：2016-12-29

申请号：US15263545

申请日：2016-09-13

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Hidekazu Ono ,  Nobuaki Tsuji ,  Tsuyoshi Okami ,  Takashi Mizota

IPC: G01C19/5726

CPC classification number: G01C19/5726

Abstract: A vibrator drive circuit is configured to drive a vibrator mass 3 in a prescribed vibration direction. The vibrator drive circuit includes a drive unit configured to drive a vibrator based on a reference signal SG1 of a predetermined frequency to cause the vibrator to vibrate in a vibration direction, a phase detector configured to detect a vibration waveform of the vibrator in the vibration direction and to output an output voltage Vcnt in accordance with a phase difference between reference signal SG1 and a vibration waveform thereof, and two capacitors each formed of a movable electrode provided in the vibrator and a fixed electrode provided to face the movable electrode, the output voltage Vcnt being applied to the fixed electrode. The phase detector is configured to adjust the output voltage Vcnt in accordance with the phase difference, thereby changing electrostatic force in each of the capacitors for controlling the phase difference to be 90 degrees.

Abstract translation: 振动器驱动电路构造成在规定的振动方向驱动振动体3。 振动器驱动电路包括：驱动单元，被配置为基于预定频率的参考信号SG1驱动振动器以使振动器沿振动方向振动;相位检测器，被配置为检测振动器在振动方向上的振动波形 并且根据参考信号SG1和其振动波形之间的相位差输出输出电压Vcnt，以及由设置在振动器中的可动电极形成的两个电容器和设置成面对可动电极的固定电极，输出电压 Vcnt被施加到固定电极。 相位检测器被配置为根据相位差来调节输出电压Vcnt，从而将用于控制相位差的每个电容器中的静电力改变为90度。

公开(公告)号：US10175045B2

公开(公告)日：2019-01-08

申请号：US15263545

申请日：2016-09-13

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Hidekazu Ono ,  Nobuaki Tsuji ,  Tsuyoshi Okami ,  Takashi Mizota

IPC: G01C19/5726

Abstract: A vibrator drive circuit is configured to drive a vibrator mass 3 in a prescribed vibration direction. The vibrator drive circuit includes a drive unit configured to drive a vibrator based on a reference signal SG1 of a predetermined frequency to cause the vibrator to vibrate in a vibration direction, a phase detector configured to detect a vibration waveform of the vibrator in the vibration direction and to output an output voltage Vcnt in accordance with a phase difference between reference signal SG1 and a vibration waveform thereof, and two capacitors each formed of a movable electrode provided in the vibrator and a fixed electrode provided to face the movable electrode, the output voltage Vcnt being applied to the fixed electrode. The phase detector is configured to adjust the output voltage Vcnt in accordance with the phase difference, thereby changing electrostatic force in each of the capacitors for controlling the phase difference to be 90 degrees.

公开(公告)号：US10287159B2

公开(公告)日：2019-05-14

申请号：US15363431

申请日：2016-11-29

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Junya Matsuoka ,  Nobuaki Tsuji ,  Yuki Ueya ,  Tsuyoshi Okami ,  Takashi Mizota

IPC: G01P15/02 ,  B81B3/00 ,  G01C19/5769 ,  H01L29/84 ,  B81C1/00 ,  G01P15/08

Abstract: A MEMS device including a fixed member and a movable member supported via a resilient body. The MEMS device includes an impact alleviation mechanism provided at a position where the movable member and the fixed member collide during operation. The impact alleviation mechanism includes a stopper provided to either the fixed member or the movable member and that protrude to be parallel between sides of the two members with at least one side edge fixed to the respective member. Moreover, the impact alleviation mechanism includes an elongate protruding member provided on the other of the fixed member and the movable member. The elongate protruding member and the stopper are configured such that as collision force increases between the movable member and the fixed member during operation, an abutment area of an outer edge position of the elongate protruding member approaches the fixed side edge of the stopper.

公开(公告)号：US20170073216A1

公开(公告)日：2017-03-16

申请号：US15361972

申请日：2016-11-28

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Tsuyoshi Okami ,  Takashi Mizota ,  Yuki Ueya ,  Junya Matsuoka ,  Nobuaki Tsuji

IPC: B81B3/00 ,  G01C19/5762

CPC classification number: B81B3/0021 ,  B81B3/00 ,  B81B3/0045 ,  B81B2201/0228 ,  B81B2201/0242 ,  B81B2203/0154 ,  G01C19/5762 ,  H01L41/113 ,  H01L41/1132 ,  H01L41/125

Abstract: A MEMS structure includes a planar substrate, a support body coupled to the planar substrate, a fixed electrode coupled to the planar substrate and a moveable portion. The movable portion is spaced from and faces the fixed electrode. The movable electrode includes a movable weight and an intermediate frame surrounding an outer edge of the movable weight. A plurality of elastic supports connect the movable weight to the intermediate frame. The elastic supports are elastically deformable in a first direction extending parallel to the plane of the substrate such that the movable weight can move in the first direction. At least one torsion bar pivotally connects one end of the intermediate frame to the support body so as to allow the intermediate frame, and with it the movable weight, to pivot around an axis which extends parallel to the plane of the substrate and perpendicular to the first direction.

Abstract translation: MEMS结构包括平面基板，耦合到平面基板的支撑体，耦合到平面基板的固定电极和可移动​​部分。 可动部与固定电极间隔开并面对固定电极。 可移动电极包括可移动重物和围绕可移动重物的外边缘的中间框架。 多个弹性支撑件将可移动重物连接到中间框架。 弹性支撑件可在平行于基板的平面延伸的第一方向上弹性变形，使得可移动的重物能够沿第一方向移动。 至少一个扭力杆将中间框架的一端枢转地连接到支撑体，以便允许中间框架，并且与其一起移动的重物围绕平行于基板平面延伸的轴线并垂直于 第一个方向

公开(公告)号：US20160097642A1

公开(公告)日：2016-04-07

申请号：US14970844

申请日：2015-12-16

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Tsuyoshi Okami ,  Nobuaki TSUJI ,  Hidekazu ONO

IPC: G01C19/5712 ,  H02N1/00

CPC classification number: G01C19/5712 ,  B81B3/0037 ,  B81B2201/0285 ,  B81B2203/0136 ,  B81B2203/019 ,  G01C19/5747 ,  H02N1/008

Abstract: A MEMS sensor module of the present invention, in particular, a vibration driving module includes: a movable electrode supported such that the movable electrode is able to be vibrated, the movable electrode extending in a vibration direction; a fixed electrode provided substantially in parallel with the movable electrode and extending in the vibration direction; a plurality of projection portions provided side by side on a facing wall surface of the movable electrode in the vibration direction, the facing wall surface of the movable electrode facing the fixed electrode; and a plurality of projection portions provided on a facing wall surface of the fixed electrode, the facing wall surface of the fixed electrode facing the movable electrode, the plurality of projection portions of the fixed electrode facing the projection portions of the movable electrode.

Abstract translation: 本发明的MEMS传感器模块，特别是振动驱动模块，其特征在于，包括：可动电极，其以可动电极振动的方式被支撑，所述可动电极沿振动方向延伸; 固定电极，其与所述可动电极大致平行地设置并沿振动方向延伸; 在可动电极的振动方向的面对壁面上并排设置的多个突出部，可动电极的面对固定电极的面对壁面; 以及设置在所述固定电极的相对壁面上的多个突出部，所述固定电极的面对所述可动电极的所述面对壁面，所述固定电极的所述多个突起部与所述可动电极的突出部相对。