Invention Grant
- Patent Title: Methods and systems for delivering process gases to critical process applications
-
Application No.: US15310775Application Date: 2015-05-12
-
Publication No.: US10196685B2Publication Date: 2019-02-05
- Inventor: Daniel Alvarez, Jr. , Jeffrey J. Spiegelman , Russell J. Holmes , Edward Heinlein , Zohreh Shamsi , Christopher Ramos , Alex Deptala , James Hogan
- Applicant: RASIRC, INC.
- Applicant Address: US CA San Diego
- Assignee: RASIRC, Inc.
- Current Assignee: RASIRC, Inc.
- Current Assignee Address: US CA San Diego
- Agency: Wagenknecht IP Law Group PC
- International Application: PCT/US2015/030422 WO 20150512
- International Announcement: WO2015/175564 WO 20151119
- Main IPC: A61L2/00
- IPC: A61L2/00 ; A61L9/00 ; B01D47/02 ; C12Q1/6848 ; A61L2/20 ; C12Q1/6806 ; A61L2/18
Abstract:
Methods and delivery systems for providing a gas phase of a multi-component liquid source for delivery to a critical process application are provided. The methods include concentration of a component of the liquid source which is less volatile than water for delivery of a gas stream comprising the less volatile component to a critical process application. Critical process applications include decontamination and microelectronic processing applications.
Public/Granted literature
- US20170072081A1 METHODS AND SYSTEMS FOR DELIVERING PROCESS GASES TO CRITICAL PROCESS APPLICATIONS Public/Granted day:2017-03-16
Information query
IPC分类:
