Invention Grant
- Patent Title: Image-forming device, and dimension measurement device
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Application No.: US14377382Application Date: 2013-02-12
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Publication No.: US10197783B2Publication Date: 2019-02-05
- Inventor: Yasunori Takasugi , Kei Sakai , Satoru Yamaguchi , Kazuyuki Hirao
- Applicant: Hitachi High-Technologies Corporation
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2012-027963 20120213
- International Application: PCT/JP2013/053170 WO 20130212
- International Announcement: WO2013/122019 WO 20130822
- Main IPC: G02B21/36
- IPC: G02B21/36 ; G01B15/00 ; G01B15/04 ; H01J37/28 ; G02B21/00 ; G06K9/62 ; G06T7/32 ; H01J37/317

Abstract:
The purpose of the present invention is to provide an image forming device and the like that is capable of forming a proper integrated signal even when an image or a signal waveform is acquired from a pattern having the possibility of preventing proper matching, such as a repetition pattern, a shrinking pattern, and the like. In order to achieve the purpose, there is proposed an image forming device that forms an integrated image by integrating a plurality of image signals and that is provided with: a matching processing section that performs a matching process between the plurality of image signals; an image integration section that integrates the plurality of image signals for which positioning has been performed by the matching processing section; and a periodicity determination section that determines a periodicity of a pattern contained in the image signals. The matching processing section varies a size of an image signal area for the matching in accordance with a determination by the periodicity determination section.
Public/Granted literature
- US20150002652A1 Image-Forming Device, and Dimension Measurement Device Public/Granted day:2015-01-01
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