Invention Grant
- Patent Title: Liquid coating method, liquid coating apparatus, and computer-readable storage medium
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Application No.: US14729385Application Date: 2015-06-03
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Publication No.: US10201826B2Publication Date: 2019-02-12
- Inventor: Katsunori Ichino , Takayuki Ishii , Kouzou Kawahara , Daisuke Simokawa , Kazuyuki Tashiro
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Abelman, Frayne & Schwab
- Priority: JP2014-115576 20140604; JP2015-041553 20150303
- Main IPC: B05D3/12
- IPC: B05D3/12 ; B05C5/02 ; B05C11/10 ; B05D1/00 ; G03F7/16 ; H01L21/67

Abstract:
Disclosed is a liquid coating method. The method executes processes of: coating a coating liquid in a spiral form on a surface of a substrate by ejecting the coating liquid from the ejection nozzle while moving the ejection nozzle in a predetermined direction between the rotary axis and a peripheral edge of the substrate during rotation of the substrate; making a linear velocity at an ejection position of the coating liquid from the ejection nozzle substantially constant by reducing a number of rotations of the substrate as the ejection position is positioned closer to the peripheral edge of the substrate; and making an ejection flow rate of the coating liquid ejected from the ejection nozzle substantially constant by changing a gap between the ejection port of the ejection nozzle and the surface of the substrate based on a flow rate of the coating liquid before ejection from the ejection nozzle.
Public/Granted literature
- US20150352587A1 LIQUID COATING METHOD, LIQUID COATING APPARATUS, AND COMPUTER-READABLE STORAGE MEDIUM Public/Granted day:2015-12-10
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