Invention Grant
- Patent Title: Measurement of surface topography of a work-piece
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Application No.: US15794707Application Date: 2017-10-26
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Publication No.: US10203198B2Publication Date: 2019-02-12
- Inventor: Wojciech J. Walecki
- Applicant: APPLEJACK 199 L.P.
- Applicant Address: US CA Milpitas
- Assignee: APPLEJACK 199 L.P.
- Current Assignee: APPLEJACK 199 L.P.
- Current Assignee Address: US CA Milpitas
- Agency: Maschoff Brennan
- Main IPC: G01B11/16
- IPC: G01B11/16 ; G01B11/24

Abstract:
An apparatus and a method for measuring surface topography of a work-piece are described. The apparatus comprises a light emitting assembly configured to emit an emitted beam of light, the emitted beam being emitted at a plurality of wavelengths and modulated at modulating frequency, the emitted beam being directed onto a surface of a work-piece. A detector is configured to receive a reflected beam of light that includes at least a portion of the emitted beam as reflected from the surface of the work-piece. The detector is further configured to generate a signal indicative of a position of the reflected beam on the detector. A signal processing unit is configured to remove noise from the signal thus generated based on the modulating frequency to obtain a processed signal. A control unit is configured to determine topography of the surface based on the processed signal.
Public/Granted literature
- US20180335295A1 MEASUREMENT OF SURFACE TOPOGRAPHY OF A WORK-PIECE Public/Granted day:2018-11-22
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