Invention Grant
- Patent Title: Development method, development device, and non-transitory computer-readable storage medium
-
Application No.: US15444671Application Date: 2017-02-28
-
Publication No.: US10203605B2Publication Date: 2019-02-12
- Inventor: Yusaku Hashimoto , Takeshi Shimoaoki , Masahiro Fukuda , Kouichirou Tanaka
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Minato-Ku
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Minato-Ku
- Agency: Burr & Brown, PLLC
- Priority: JP2016-074364 20160401
- Main IPC: G03F7/32
- IPC: G03F7/32 ; G03F7/26 ; B05D1/00 ; G03F7/30 ; G03F7/40 ; H01L21/027 ; H01L21/67

Abstract:
A development method includes: a development step of supplying a developing solution to a surface of a substrate for manufacturing a semiconductor device after undergoing formation of a resist film and exposure, to perform development; a first rotation step of, after the development step, increasing revolution speed of the substrate to rotate the substrate in a first rotational direction around a central axis so as to spin off and remove part of the developing solution from the substrate; and a second rotation step of, after the first rotation step, rotating the substrate in a second rotational direction reverse to the first rotational direction so as to spin off and remove the developing solution remaining on the substrate from the substrate.
Public/Granted literature
- US20170285481A1 DEVELOPMENT METHOD, DEVELOPMENT DEVICE, AND NON-TRANSITORY COMPUTER-READABLE STORAGE MEDIUM Public/Granted day:2017-10-05
Information query
IPC分类: