Invention Grant
- Patent Title: Extreme ultraviolet light generating apparatus
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Application No.: US16001091Application Date: 2018-06-06
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Publication No.: US10209625B2Publication Date: 2019-02-19
- Inventor: Hirokazu Hosoda
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Priority: WOPCT/JP2016/051620 20160120
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H05G2/00

Abstract:
An extreme ultraviolet light generating apparatus may include: a chamber, within which extreme ultraviolet light is generated from a droplet which is supplied to a predetermined region therein; an image forming optical system that forms an image of the droplet supplied to the predetermined region; an imaging element that captures an image of the formed image; a stage that moves the image forming optical system and/or the imaging element in an optical axis direction of the image forming optical system; a light energy measuring unit that measures light energy which is generated when the extreme ultraviolet light is generated; and a control unit that controls the stage based on a measured value of the light energy measured by the light energy measuring unit such that an image formation plane of the image of the droplet formed by the image forming optical system matches an imaging surface of the imaging element.
Public/Granted literature
- US20180284618A1 EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS Public/Granted day:2018-10-04
Information query
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