Invention Grant
- Patent Title: Photolithography method based on electronic beam
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Application No.: US15615348Application Date: 2017-06-06
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Publication No.: US10216088B2Publication Date: 2019-02-26
- Inventor: Peng Liu , Wei Zhao , Xiao-Yang Lin , Duan-Liang Zhou , Chun-Hai Zhang , Kai-Li Jiang , Shou-Shan Fan
- Applicant: Tsinghua University , HON HAI PRECISION INDUSTRY CO., LTD.
- Applicant Address: CN Beijing TW New Taipei
- Assignee: Tsinghua University,HON HAI PRECISION INDUSTRY CO., LTD.
- Current Assignee: Tsinghua University,HON HAI PRECISION INDUSTRY CO., LTD.
- Current Assignee Address: CN Beijing TW New Taipei
- Agency: ScienBiziP, P.C.
- Priority: CN201610405199 20160608
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H01J37/00

Abstract:
The disclosure relates to a photolithography method based on electronic beam. The method includes: providing an electronic beam; making the electron beam transmit a two dimensional nanomaterial to form a transmission electron beam and a number of diffraction electron beams; shielding the transmission electron beam; and radiating a surface of an object by the plurality of diffraction electron beams. The photolithography method is high efficiency and has low cost.
Public/Granted literature
- US20170357157A1 PHOTOLITHOGRAPHY METHOD BASED ON ELECTRONIC BEAM Public/Granted day:2017-12-14
Information query
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