Invention Grant
- Patent Title: Wrapped source/drain contacts with enhanced area
-
Application No.: US15803983Application Date: 2017-11-06
-
Publication No.: US10224431B2Publication Date: 2019-03-05
- Inventor: Kangguo Cheng , Zuoguang Liu , Heng Wu , Peng Xu
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L27/088 ; H01L23/528 ; H01L21/311 ; H01L21/308 ; H01L21/306 ; H01L21/8234 ; H01L21/02 ; H01L29/66

Abstract:
Methods of forming semiconductor devices include forming a first dielectric layer over a semiconductor fin. A second dielectric layer is formed around the first dielectric layer. The semiconductor fin is recessed below a height of the first and second dielectric layers. Source and drain extensions are grown from the recessed semiconductor fin. The first dielectric layer is recessed to expose an underside of and sidewalls of the source/drain extensions. Conductive contacts are formed around exposed portions of the source/drain extensions.
Public/Granted literature
- US20180269325A1 WRAPPED SOURCE/DRAIN CONTACTS WITH ENHANCED AREA Public/Granted day:2018-09-20
Information query
IPC分类: