Invention Grant
- Patent Title: Extreme ultraviolet light generation device
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Application No.: US15888110Application Date: 2018-02-05
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Publication No.: US10251253B2Publication Date: 2019-04-02
- Inventor: Fumio Iwamoto , Tsukasa Hori , Toshiyuki Hirashita
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H05G2/00
- IPC: H05G2/00

Abstract:
An extreme ultraviolet light generation device may include a chamber in which a target is irradiated with laser light and extreme ultraviolet light is generated, and a target supply unit configured to eject a target into the chamber. The target supply unit may be provided with a nozzle member including an ejection face having an ejection port configured to eject the target into the chamber. An angle θ1 defined by the ejection face and the gravity axis may satisfy a condition of “0 degrees
Public/Granted literature
- US20180160519A1 EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE Public/Granted day:2018-06-07
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