Invention Grant
- Patent Title: Vertically integrated multispectral imaging sensor with graphene as electrode and diffusion barrier
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Application No.: US15827785Application Date: 2017-11-30
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Publication No.: US10256306B1Publication Date: 2019-04-09
- Inventor: Qing Cao , Ning Li , Jianshi Tang
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Main IPC: H01L31/00
- IPC: H01L31/00 ; H01L29/16 ; H04N5/33 ; H01L27/146 ; G01N21/25 ; G01J3/447 ; G01N21/31 ; G01J3/28

Abstract:
A vertically integrated multispectral imaging sensor includes a first metal contact layer on a substrate, an SiO2 layer on the first metal contact layer with a first detector element embedded in a hole therein, a first graphene layer that covers the first detector element, a second metal contact layer on the SiO2 layer on one side of the first graphene, an AlO3 layer on the SiO2 layer, in which a second detector element is embedded in a hole over the first graphene layer, a second graphene layer on the second detector element, and a third metal contact layer on the AlO3 layer adjacent to the second graphene layer. The first detector material is sensitive to a different wavelength band of the electromagnetic spectrum than the second detector material.
Information query
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