Invention Grant
- Patent Title: Systems, apparatus, and methods for an improved load port
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Application No.: US15348967Application Date: 2016-11-10
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Publication No.: US10262884B2Publication Date: 2019-04-16
- Inventor: Luke W. Bonecutter , David T. Blahnik , Paul B. Reuter
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Dugan & Dugan, PC
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/673 ; H01L21/677

Abstract:
Embodiments provide systems, apparatus, and methods for an improved load port that includes a frame supporting a dock and a carrier opener; an elevator operable to raise and lower the carrier opener; an isolation compartment within which the elevator is operable to move, the isolation compartment including a volume isolated from a volume of an equipment front end module (EFEM); and a purge supply within the isolation compartment operable to purge the isolation compartment of reactive gas trapped within the isolation compartment. Numerous additional aspects are disclosed.
Public/Granted literature
- US20180130685A1 SYSTEMS, APPARATUS, AND METHODS FOR AN IMPROVED LOAD PORT Public/Granted day:2018-05-10
Information query
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