公开(公告)号：US10832928B2

公开(公告)日：2020-11-10

申请号：US16284675

申请日：2019-02-25

Applicant: Applied Materials, Inc.

Inventor： Luke W. Bonecutter ,  David T. Blahnik ,  Paul B. Reuter

IPC: H01L21/673 ,  H01L21/677

Abstract: Embodiments provide systems, apparatus, and methods for an improved load port that includes a frame supporting a dock and a carrier opener; an elevator operable to raise and lower the carrier opener; an isolation compartment within which the elevator is operable to move, the isolation compartment including a volume isolated from a volume of an equipment front end module (EFEM); and a purge supply within the isolation compartment operable to purge the isolation compartment of reactive gas trapped within the isolation compartment. Numerous additional aspects are disclosed.

公开(公告)号：US20160218028A1

公开(公告)日：2016-07-28

申请号：US15001716

申请日：2016-01-20

Applicant: Applied Materials, Inc.

Inventor： Jason M. Schaller ,  Robert Brent Vopat ,  Paul E. Pergande ,  Benjamin B. Riordon ,  David T. Blahnik ,  William T. Weaver

IPC: H01L21/673

CPC classification number: H01L21/67017 ,  H01L21/67109 ,  H01L21/6732 ,  H01L21/68742

Abstract: Wafer cassettes and methods of use that provide heating a cooling to a plurality of wafers to decrease time between wafer switching in a processing chamber. Wafers are supported on a wafer lift which can move all wafers together or on independent lift pins which can move individual wafers for heating and cooling.

Abstract translation: 晶片盒和使用方法为多个晶片提供加热冷却以减少处理室中的晶片切换之间的时间。 晶片支撑在晶片升降机上，其可以将所有晶片移动到一起或独立的提升销上，该提升销可移动各个晶片以进行加热和冷却。

公开(公告)号：US11895766B2

公开(公告)日：2024-02-06

申请号：US17502279

申请日：2021-10-15

Applicant: Applied Materials, Inc.

Inventor： David T. Blahnik ,  Charles T. Carlson ,  Robert B. Vopat ,  Frank Sinclair ,  Paul J. Murphy ,  Krag R. Senior

IPC: H05H7/22

CPC classification number: H05H7/22 ,  H05H2007/222

Abstract: Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, a LINAC may include a coil resonator and a plurality of drift tubes coupled to the coil resonator by a set of flexible leads.

公开(公告)号：US11388810B2

公开(公告)日：2022-07-12

申请号：US17024295

申请日：2020-09-17

Applicant: Applied Materials, Inc.

Inventor： Peter F. Kurunczi ,  David T. Blahnik ,  Frank Sinclair

IPC: H05H7/22 ,  H01J37/317 ,  H05H9/00

Abstract: An apparatus, system and method. An apparatus may include an RF power assembly, arranged to output an RF signal; a resonator, coupled to receive the RF signal, the resonator comprising a first output end and a second output end, and a drift tube assembly, configured to transmit an ion beam, and coupled to the resonator. As such, the drift tube assembly may include a first AC drift tube electrode, coupled to the first output end, and a second AC drift tube electrode, coupled to the second output end and separated from the first AC drift tube by a first gap. The RF power assembly may be switchable to switch output from a first Eigenmode frequency to a second Eigenmode frequency.

公开(公告)号：US20220087004A1

公开(公告)日：2022-03-17

申请号：US17024295

申请日：2020-09-17

Applicant: Applied Materials, Inc.

Inventor： Peter F. Kurunczi ,  David T. Blahnik ,  Frank Sinclair

IPC: H05H7/22 ,  H05H9/00 ,  H01J37/317

Abstract: An apparatus, system and method. An apparatus may include an RF power assembly, arranged to output an RF signal; a resonator, coupled to receive the RF signal, the resonator comprising a first output end and a second output end, and a drift tube assembly, configured to transmit an ion beam, and coupled to the resonator. As such, the drift tube assembly may include a first AC drift tube electrode, coupled to the first output end, and a second AC drift tube electrode, coupled to the second output end and separated from the first AC drift tube by a first gap. The RF power assembly may be switchable to switch output from a first Eigenmode frequency to a second Eigenmode frequency.

公开(公告)号：US20190189484A1

公开(公告)日：2019-06-20

申请号：US16284675

申请日：2019-02-25

Applicant: Applied Materials, Inc.

Inventor： Luke W. Bonecutter ,  David T. Blahnik ,  Paul B. Reuter

IPC: H01L21/673 ,  H01L21/677

Abstract: Embodiments provide systems, apparatus, and methods for an improved load port that includes a frame supporting a dock and a carrier opener; an elevator operable to raise and lower the carrier opener; an isolation compartment within which the elevator is operable to move, the isolation compartment including a volume isolated from a volume of an equipment front end module (EFEM); and a purge supply within the isolation compartment operable to purge the isolation compartment of reactive gas trapped within the isolation compartment. Numerous additional aspects are disclosed.

公开(公告)号：US12144101B2

公开(公告)日：2024-11-12

申请号：US18373128

申请日：2023-09-26

Applicant: Applied Materials, Inc.

Inventor： Costel Biloiu ,  David T. Blahnik ,  Wai-Ming Tam ,  Charles T. Carlson ,  Frank Sinclair

IPC: H05H7/02 ,  H05H7/12 ,  H05H9/00

Abstract: An exciter for a high frequency resonator. The exciter may include an exciter coil inner portion, extending along an exciter axis, an exciter coil loop, disposed at a distal end of the exciter coil inner portion. The exciter may also include a drive mechanism, including at least a rotation component to rotate the exciter coil loop around the exciter axis.

公开(公告)号：US20230120769A1

公开(公告)日：2023-04-20

申请号：US17502279

申请日：2021-10-15

Applicant: Applied Materials, Inc.

Inventor： David T. Blahnik ,  Charles T. Carlson ,  Robert B. Vopat ,  Frank Sinclair ,  Paul J. Murphy ,  Krag R. Senior

IPC: H05H7/22

Abstract: Embodiments herein are directed to a linear accelerator assembly for an ion implanter. In some embodiments, a LINAC may include a coil resonator and a plurality of drift tubes coupled to the coil resonator by a set of flexible leads.

公开(公告)号：US20220174810A1

公开(公告)日：2022-06-02

申请号：US17108747

申请日：2020-12-01

Applicant: Applied Materials, Inc.

Inventor： Costel Biloiu ,  Charles T. Carlson ,  Frank Sinclair ,  Paul J. Murphy ,  David T. Blahnik

IPC: H05H7/22 ,  H01J37/317

Abstract: An apparatus may include a drift tube assembly, arranged to transmit an ion beam. The drift tube assembly may include a first ground electrode; an RF drift tube assembly, disposed downstream of the first ground electrode; and a second ground electrode, disposed downstream of the RF drift tube assembly. The RF drift tube assembly may define a triple gap configuration. The apparatus may include a resonator, where the resonator comprises a toroidal coil, having a first end, connected to a first RF drift tube of the RF drift tube assembly, and a second end, connected to a second RF drift tube of the RF drift tube assembly.

公开(公告)号：US10453726B2

公开(公告)日：2019-10-22

申请号：US15348947

申请日：2016-11-10

Applicant: Applied Materials, Inc.

Inventor： David T. Blahnik ,  Paul B. Reuter ,  Luke W. Bonecutter ,  Douglas B. Baumgarten

IPC: H01L21/677 ,  H01L21/67

Abstract: An electronic device manufacturing system includes a factory interface that has a load port. The load port may include a panel having an opening therein and a carrier door opener that seals the opening when the door is closed. The carrier door opener may have a groove along an outer portion of the door. The groove may have a cross-sectional shape of a triangular prism frustum. A hollow O-ring may be seated in the groove and is configured to engage the panel when the carrier door opener is closed against the panel. Methods of assembling a factory interface for an electronic device manufacturing system are also provided, as are other aspects.