Invention Grant
- Patent Title: Developing treatment method, non-transitory computer storage medium and developing treatment apparatus
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Application No.: US15256948Application Date: 2016-09-06
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Publication No.: US10281822B2Publication Date: 2019-05-07
- Inventor: Minoru Kubota
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Posz Law Group, PLC
- Priority: JP2015-188094 20150925
- Main IPC: G03F7/32
- IPC: G03F7/32 ; G03F7/06 ; H01L21/67 ; B05D1/00 ; G03F7/30

Abstract:
A developing treatment method supplies a developing solution onto a substrate to develop a resist film on the substrate with a predetermined pattern exposed thereon. The method supplies pure water to a central portion of the substrate to form a puddle of the pure water, and then moves a nozzle in a radial direction passing through a center of the substrate while supplying a developing solution to the puddle of the pure water from the nozzle with a wetted surface of the nozzle in contact with the puddle of the pure water, to form a puddle of a diluted developing solution on the substrate. The method then rotates the substrate to diffuse the puddle of the diluted developing solution over an entire surface of the substrate; and then supplies a developing solution to the substrate to develop the substrate.
Public/Granted literature
- US20170090292A1 DEVELOPING TREATMENT METHOD, NON-TRANSITORY COMPUTER STORAGE MEDIUM AND DEVELOPING TREATMENT APPARATUS Public/Granted day:2017-03-30
Information query
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