Invention Grant
- Patent Title: Micromechanical sensor and method for producing a micromechanical sensor
-
Application No.: US15582333Application Date: 2017-04-28
-
Publication No.: US10294095B2Publication Date: 2019-05-21
- Inventor: Benny Pekka Herzogenrath , Johannes Classen
- Applicant: Robert Bosch GmbH
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Maginot, Moore & Beck LLP
- Priority: DE102016208925 20160524
- Main IPC: H01L29/84
- IPC: H01L29/84 ; B81B3/00 ; B81C1/00 ; G01C19/5712 ; G01P15/125 ; G01C19/56 ; G01C19/5656 ; G01P1/00 ; G01P15/08

Abstract:
A micromechanical sensor that is produced surface-micromechanically includes at least one mass element formed in a third functional layer that is non-perforated at least in certain portions. The sensor has a gap underneath the mass element that is formed by removal of a second functional layer and at least one oxide layer. The removal of the at least one oxide layer takes place by introducing a gaseous etching medium into a defined number of etching channels arranged substantially parallel to one another. The etching channels are configured to be connected to a vertical access channel in the third functional layer.
Public/Granted literature
- US20170341927A1 Micromechanical Sensor and Method for Producing a Micromechanical Sensor Public/Granted day:2017-11-30
Information query
IPC分类: