Invention Grant
- Patent Title: Extreme ultraviolet light generation device
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Application No.: US16001239Application Date: 2018-06-06
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Publication No.: US10303061B2Publication Date: 2019-05-28
- Inventor: Yuichi Nishimura , Takayuki Yabu , Yoshifumi Ueno
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: G03F7/20
- IPC: G03F7/20 ; H05G2/00

Abstract:
An extreme ultraviolet light generation device includes: an EUV sensor configured to measure energy of extreme ultraviolet light generated when a target is irradiated with a plurality of laser beams in a predetermined region in a chamber; an irradiation position adjustment unit configured to adjust at least one of irradiation positions of the laser beams with which the target is irradiated in the predetermined region; an irradiation timing adjustment unit configured to adjust at least one of irradiation timings of the laser beams with which the target is irradiated in the predetermined region; and a control unit configured to control the irradiation position adjustment unit and the irradiation timing adjustment unit, the control unit controlling the irradiation position adjustment unit and then controlling the irradiation timing adjustment unit based on a measurement result of the EUV sensor.
Public/Granted literature
- US20180284617A1 EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE Public/Granted day:2018-10-04
Information query
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