Invention Grant
- Patent Title: Variable adjustment for precise matching of multiple chamber cavity housings
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Application No.: US15892756Application Date: 2018-02-09
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Publication No.: US10312129B2Publication Date: 2019-06-04
- Inventor: Stephen Dale Coomer
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere AP
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere AP
- Agency: Snell & Wilmer L.L.P.
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/68
Abstract:
A vertical adjustment assembly is disclosed in order to provide for matching vertical positions of two substrates within separate chambers or cavities of a reaction system for processing of semiconductor substrates. The vertical adjustment assembly, in cooperation with a main lift driver, can provide for a more accurate positioning of the substrates to account for a tolerance stack-up error.
Public/Granted literature
- US20180166315A1 VARIABLE ADJUSTMENT FOR PRECISE MATCHING OF MULTIPLE CHAMBER CAVITY HOUSINGS Public/Granted day:2018-06-14
Information query
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