Invention Grant
- Patent Title: Method and apparatus to detect defects in transparent solids
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Application No.: US15607648Application Date: 2017-05-29
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Publication No.: US10338009B2Publication Date: 2019-07-02
- Inventor: Steven W. Meeks , Ronny Soetarman
- Applicant: Zeta Instruments, Inc.
- Applicant Address: US CA Milpitas
- Assignee: KLA-TENCOR CORPORATION
- Current Assignee: KLA-TENCOR CORPORATION
- Current Assignee Address: US CA Milpitas
- Agency: Imperium Patent Works LLP
- Agent Mark D. Marrello
- Main IPC: G01N21/958
- IPC: G01N21/958 ; G01N21/47

Abstract:
A method and apparatus to measure specular reflection intensity, specular reflection angle, near specular scattered radiation, and large angle scattered radiation and determine the location and type of defect present in a first and a second transparent solid that have abutting surfaces. The types of defects include a top surface particle, an interface particle, a bottom surface particle, an interface bubble, a top surface pit, and a stain. The four measurements are conducted at multiple locations along the surface of the transparent solid and the measured information is stored in a memory device. The difference between an event peak and a local average of measurements for each type of measurement is used to detect changes in the measurements. Information stored in the memory device is processed to generate a work piece defect mapping indicating the type of defect and the defect location of each defect found.
Public/Granted literature
- US20170261440A1 METHOD AND APPARATUS TO DETECT DEFECTS IN TRANSPARENT SOLIDS Public/Granted day:2017-09-14
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