Model based lamp background filtration of stray radiation for pyrometry
Abstract:
The embodiments described herein generally relate to systems for noise compensation for proper temperature detection in thermal processing chambers and devices for achieving the same. In one embodiment, a system is disclosed herein. The system includes a processing chamber, a substrate, a pyrometer, and a controller. The processing chamber is configured to process a substrate. The substrate support is disposed in the processing chamber. The pyrometer is positioned to receive radiation emitted by a substrate or a component of the processing chamber and generating a pyrometer signal indicative of the received radiation. The controller is configured to subtract a time invariant noise component and a time variant noise component from the pyrometer signal during processing of a substrate.
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