Invention Grant
- Patent Title: Model based lamp background filtration of stray radiation for pyrometry
-
Application No.: US15665545Application Date: 2017-08-01
-
Publication No.: US10345155B2Publication Date: 2019-07-09
- Inventor: Kailash Kiran Patalay , Aaron Muir Hunter
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: G01K15/00
- IPC: G01K15/00 ; G01K1/00 ; G01K13/00 ; G01J5/10 ; H01L21/67 ; G01J5/00

Abstract:
The embodiments described herein generally relate to systems for noise compensation for proper temperature detection in thermal processing chambers and devices for achieving the same. In one embodiment, a system is disclosed herein. The system includes a processing chamber, a substrate, a pyrometer, and a controller. The processing chamber is configured to process a substrate. The substrate support is disposed in the processing chamber. The pyrometer is positioned to receive radiation emitted by a substrate or a component of the processing chamber and generating a pyrometer signal indicative of the received radiation. The controller is configured to subtract a time invariant noise component and a time variant noise component from the pyrometer signal during processing of a substrate.
Public/Granted literature
- US20180045575A1 MODEL BASED LAMP BACKGROUND FILTRATION OF STRAY RADIATION FOR PYROMETRY Public/Granted day:2018-02-15
Information query