Invention Grant
- Patent Title: Electrostatic chuck and method for manufacturing electrostatic chuck
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Application No.: US15021897Application Date: 2014-09-04
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Publication No.: US10347520B2Publication Date: 2019-07-09
- Inventor: Ok Ryul Kim , Ok Min Kim
- Applicant: FEMVIX CORP. , Ok Ryul Kim , Ok Min Kim
- Applicant Address: KR Gyeonggi-do KR Gyeonggi-do KR Gyeonggi-do
- Assignee: FEMVIX,Ok Ryul Kim,Ok Min Kim
- Current Assignee: FEMVIX,Ok Ryul Kim,Ok Min Kim
- Current Assignee Address: KR Gyeonggi-do KR Gyeonggi-do KR Gyeonggi-do
- Agency: Novick, Kim & Lee, PLLC
- Agent Sang Ho Lee
- Priority: KR10-2013-0110964 20130916
- International Application: PCT/KR2014/008316 WO 20140904
- International Announcement: WO2015/037872 WO 20150319
- Main IPC: H01L21/683
- IPC: H01L21/683 ; B05D3/04 ; B05D1/02 ; H02N13/00

Abstract:
Provided is an electrostatic chuck including: a base material; an adsorption unit for adsorbing a wafer by using electrostatic force; an adhesive layer for adhering the adsorption unit to the base material; and an adhesive layer anti-corrosion coating layer provided to cover an exposed surface of the adhesive layer, wherein the adhesive layer anti-corrosion coating layer has no pores or cracks since the adhesive layer anti-corrosion coating layer is made by a method of spraying and coating, at conditions of 0-50° C. and a vacuum state, ceramic powder which is continuously supplied at a constant quantity to the carrier gas of which a fixed flow rate is controlled, and a method for manufacturing an electrostatic chuck, including the steps of: (a) forming an adhesive layer for adhering an adsorption unit for adsorbing a wafer to a base material by using electrostatic force; and (b) forming an adhesive layer anti-corrosion coating layer which covers an exposed surface of the adhesive layer and has no pores or cracks as it is made by a method of spraying and coating, at conditions of 0-50° C. and a vacuum state, ceramic powder which is continuously supplied at a constant quantity to the carrier gas of which a fixed flow rate is controlled.
Public/Granted literature
- US20160233121A1 ELECTROSTATIC CHUCK AND METHOD FOR MANUFACTURING ELECTROSTATIC CHUCK Public/Granted day:2016-08-11
Information query
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