Invention Grant
- Patent Title: Cross-talk suppression in Geiger-mode avalanche photodiodes
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Application No.: US14587053Application Date: 2014-12-31
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Publication No.: US10361334B2Publication Date: 2019-07-23
- Inventor: K. Alexander McIntosh , David C. Chapman , Joseph P. Donnelly , Douglas C. Oakley , Antonio Napoleone , Erik K. Duerr , Simon Verghese , Richard D. Younger
- Applicant: Massachusetts Institute of Technology
- Applicant Address: US MA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US MA Cambridge
- Agent Theresa A. Lober
- Main IPC: H01L31/107
- IPC: H01L31/107 ; H01L27/144 ; H01L31/0216 ; H01L25/16 ; H01L31/02 ; H01L31/0232 ; H01L31/0304 ; H01L31/0352

Abstract:
An avalanche photodiode detector is provided with a substrate including an array of avalanche photodiodes. An optical interface surface of the substrate is arranged for accepting external input radiation. There is provided at least one cross-talk blocking layer of material including apertures positioned to allow external input radiation to reach photodiodes and including material regions positioned for attenuating radiation in the substrate that is produced by photodiodes in the array. Alternatively at least one cross-talk blocking layer of material is disposed on the optical interface surface of the substrate to allow external input radiation to reach photodiodes and attenuate radiation in the substrate that is produced by photodiodes in the array. At least one cross-talk filter layer of material can be disposed in the substrate adjacent to the photodiode structures, including a material that absorbs radiation in the substrate that is produced by photodiodes in the array.
Public/Granted literature
- US20160181458A1 Cross-Talk Suppression in Geiger-Mode Avalanche Photodiodes Public/Granted day:2016-06-23
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